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author:

Abliz, Ablat (Abliz, Ablat.) [1] | Wan, Da (Wan, Da.) [2] | Chen, Jui-Yuan (Chen, Jui-Yuan.) [3] | Xu, Lei (Xu, Lei.) [4] | He, Jiawei (He, Jiawei.) [5] | Yang, Yanbing (Yang, Yanbing.) [6] | Duan, Haiming (Duan, Haiming.) [7] | Liu, Chuansheng (Liu, Chuansheng.) [8] | Jiang, Changzhong (Jiang, Changzhong.) [9] | Chen, Huipeng (Chen, Huipeng.) [10] (Scholars:陈惠鹏) | Guo, Tailiang (Guo, Tailiang.) [11] (Scholars:郭太良) | Liao, Lei (Liao, Lei.) [12]

Indexed by:

EI Scopus SCIE

Abstract:

This paper investigates the effects of different passivation layers (PVLs) on the electrical performance and reliability of amorphous indium gallium zinc oxide (a-In-Ga-ZnO) thin film transistors (TFTs). By rational design, the fabricated a-InGaZnO TFT with hafnium oxide and aluminum oxide (HfO2/Al2O3) dual PVLs exhibits a field-effect mobility of 13.5 cm(2)/Vs, low sub threshold swing of 0.32 V/decade, and especially, small threshold voltage shifts of 0.5 (-0.6) V and 1.1 (-1.2) V under positive (negative) gate bias, and light illumination stress at the relative humidity of 40%. Furthermore, the a-In-Ga-ZnO TFTs with HfO2/Al2O3 dual PVLs maintain reasonable mobility and electrical performance even exposure to ambient condition for up to four months. This enhanced stability is attributed to the presence of high-quality HfO2/Al2O3 dual PVLs, which not only could suppress the photodesorption, reduce the total trap density and subgap photoexcitation behavior, but also protect the channel from environmental effects. Thus, the rational-designed HfO2/Al2O3 dual PVLs passivated a-In-Ga-ZnO TFTs with superior reliability represent a great step toward the achievement of long-term reliable zinc oxide-based oxide TFTs.

Keyword:

Amorphous indium-gallium-zinc oxide (a-In-Ga-ZnO) light illumination stress stability passivation layers (PVLs) thin film transistors (TFTs)

Community:

  • [ 1 ] [Abliz, Ablat]Hunan Univ, Sch Phys & Elect, Minist Educ, Key Lab Micro Nanooptoelect Devices, Changsha 410082, Hunan, Peoples R China
  • [ 2 ] [Xu, Lei]Hunan Univ, Sch Phys & Elect, Minist Educ, Key Lab Micro Nanooptoelect Devices, Changsha 410082, Hunan, Peoples R China
  • [ 3 ] [Yang, Yanbing]Hunan Univ, Sch Phys & Elect, Minist Educ, Key Lab Micro Nanooptoelect Devices, Changsha 410082, Hunan, Peoples R China
  • [ 4 ] [Jiang, Changzhong]Hunan Univ, Sch Phys & Elect, Minist Educ, Key Lab Micro Nanooptoelect Devices, Changsha 410082, Hunan, Peoples R China
  • [ 5 ] [Liao, Lei]Hunan Univ, Sch Phys & Elect, Minist Educ, Key Lab Micro Nanooptoelect Devices, Changsha 410082, Hunan, Peoples R China
  • [ 6 ] [Abliz, Ablat]Xinjiang Univ, Sch Phys Sci & Technol, Urumqi 830046, Peoples R China
  • [ 7 ] [Duan, Haiming]Xinjiang Univ, Sch Phys Sci & Technol, Urumqi 830046, Peoples R China
  • [ 8 ] [Wan, Da]Wuhan Univ, Sch Phys & Technol, Wuhan 430072, Hubei, Peoples R China
  • [ 9 ] [He, Jiawei]Wuhan Univ, Sch Phys & Technol, Wuhan 430072, Hubei, Peoples R China
  • [ 10 ] [Liu, Chuansheng]Wuhan Univ, Sch Phys & Technol, Wuhan 430072, Hubei, Peoples R China
  • [ 11 ] [Chen, Jui-Yuan]Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan
  • [ 12 ] [Chen, Huipeng]Fuzhou Univ, Inst Optoelect Display, Fuzhou 350002, Fujian, Peoples R China
  • [ 13 ] [Guo, Tailiang]Fuzhou Univ, Inst Optoelect Display, Fuzhou 350002, Fujian, Peoples R China

Reprint 's Address:

  • [Yang, Yanbing]Hunan Univ, Sch Phys & Elect, Minist Educ, Key Lab Micro Nanooptoelect Devices, Changsha 410082, Hunan, Peoples R China

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Source :

IEEE TRANSACTIONS ON ELECTRON DEVICES

ISSN: 0018-9383

Year: 2018

Issue: 7

Volume: 65

Page: 2844-2849

2 . 7 0 4

JCR@2018

2 . 9 0 0

JCR@2023

ESI Discipline: ENGINEERING;

ESI HC Threshold:170

JCR Journal Grade:2

CAS Journal Grade:3

Cited Count:

WoS CC Cited Count: 44

SCOPUS Cited Count: 44

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 2

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