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Abstract:
The surface-conduction electron-emission source, based on planar-gate triode with SnO2 film emitters, has been successfully fabricaed on glass substrate by magnetron sputtering, photolithography, and lift-off technology. The microstructures and field emission characteristics were characterized with scanning electron microscopy (SEM) and optical microscopy. Theresults show that the islands of tin oxide, about 100~300 nm in diameter, were depostied at the gap between the cathode and gate electrode, and that the gate voltage was capable of effectively controlling the emission and conduction currents. The electron-emission efficiency was found to be around 0.85% and the maximun brightness could reach 850 cd/m2, indicating that the SnO2 film may be a good material for fabrication of surface-conduction electron-conduction electron-emission source based on planar-gate triode.
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Journal of Vacuum Science and Technology
ISSN: 1672-7126
CN: 11-5177/TB
Year: 2013
Issue: 12
Volume: 33
Page: 1214-1218
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ESI Highly Cited Papers on the List: 0 Unfold All
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30 Days PV: 2
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