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author：

Zhang, Zhi (Zhang, Zhi.) [1] | Nie, Junyang (Nie, Junyang.) [2] | Chen, Kongjie (Chen, Kongjie.) [3] | Jiang, Bingxin (Jiang, Bingxin.) [4] | He, Shuang (He, Shuang.) [5] | Yang, Tianxi (Yang, Tianxi.) [6] | Sun, Jie (Sun, Jie.) [7] (Scholars：孙捷) | Su, Anjun (Su, Anjun.) [8] | Chen, Nianrui (Chen, Nianrui.) [9] | Zhou, Jun (Zhou, Jun.) [10] | Guo, Tailiang (Guo, Tailiang.) [11] (Scholars：郭太良) | Yan, Qun (Yan, Qun.) [12]

Indexed by：

EI

Abstract：

A　passive　matrix　(PM)　blue　Micro　light-emitting　diode　(LED)　device　with　300　μm　pixel　size　and　7/10/15/20/30/50/100　μm　luminous　area　is　designed.　The　1　μm　thick　insulating　layer　composed　of　SiO2　is　grown　in　four　steps,　which　improves　the　quality　of　the　insulating　layer　and　reduces　the　risk　of　electrical　leakage.　The　thick　metal　is　used　as　the　p　lines　and　the　n　lines.　The　non-conductive　GaN　is　left　as　the　structure　underneath　the　p　lines　to　alleviate　the　breakage　of　the　p　lines　to　improve　the　reliability　of　the　device.　The　optimized　technology　is　used　to　fabricate　the　micro-display,　and　the　optical　and　electrical　characterization　is　carried　out.　Besides,　we　realize　the　character　display.　With　no　additional　manufacturing　process,　this　work　will　contribute　to　the　implementation　of　highly　reliable　PM　Micro-LED　display　technology.　©　2022,　John　Wiley　and　Sons　Inc.　All　rights　reserved.

Keyword：

Gallium nitride III-V semiconductors Insulation Light emitting diodes Optimization Silica

Community：

  • [ 1 ] [Zhang, Zhi]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou University, Fuzhou; 350100, China
  • [ 2 ] [Nie, Junyang]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou University, Fuzhou; 350100, China
  • [ 3 ] [Nie, Junyang]Faculty of Electronic and Information Engineering, Xi'an Jiaotong University, Xi'an; 710049, China
  • [ 4 ] [Chen, Kongjie]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou University, Fuzhou; 350100, China
  • [ 5 ] [Jiang, Bingxin]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou University, Fuzhou; 350100, China
  • [ 6 ] [He, Shuang]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou University, Fuzhou; 350100, China
  • [ 7 ] [Yang, Tianxi]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou University, Fuzhou; 350100, China
  • [ 8 ] [Sun, Jie]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou University, Fuzhou; 350100, China
  • [ 9 ] [Su, Anjun]Changsha Xiangji Haidun Technology Co., Ltd., Changsha; 410100, China
  • [ 10 ] [Chen, Nianrui]Changsha Xiangji Haidun Technology Co., Ltd., Changsha; 410100, China
  • [ 11 ] [Zhou, Jun]Changsha Xiangji Haidun Technology Co., Ltd., Changsha; 410100, China
  • [ 12 ] [Guo, Tailiang]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou University, Fuzhou; 350100, China
  • [ 13 ] [Yan, Qun]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou University, Fuzhou; 350100, China
  • [ 14 ] [Yan, Qun]Faculty of Electronic and Information Engineering, Xi'an Jiaotong University, Xi'an; 710049, China

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ISSN： 0097-966X

Year： 2022

Issue： S1

Volume： 53

Page： 515-519

Language： English

Cited Count：

WoS CC Cited Count： 0

SCOPUS Cited Count： 3

ESI Highly Cited Papers on the List： 0 Unfold All

WanFang Cited Count：

Chinese Cited Count：

30 Days PV： 5

Affiliated Colleges：

物理与信息工程学院、微电子学院 本学院/部未明确归属的数据

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