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薄膜应变栅称重传感器的研制
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运用薄膜沉积技术,制作了薄膜应变栅式称重传感器。性能测试表明,由于克服了粘接胶所带来的弊病,该类传感器与贴片式传感器相比具有滞后和蠕变小,稳定性和可靠性高的特点。
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CNKI:IKJS199805019
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Chinese
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测控技术
Year: 1998
Issue: 05
Page: 45-46
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