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Abstract:
Giant magnetostrictive films (GMFs) of TbDy-Fe were grown on cold substrate by ion beam sputtering (IBS) of target of (Tb-Dy)Fe, prepared by vacuum casting. Influence of the sputtering orientation (α angle) on the film growth and characteristics of the film were studied. The results show that within the given sputtering angle, compact amorphous TbDy-Fe GMF with smooth surface and high interfacial adhesion can be easily grown and that as a changes from α1 to α9 (at an interval of about 2 degree), various parameters,including its deposition rate, its stoichiometry and its magnetostrictive coefficient (λ), all vary accordingly. For example, at a sputtering orientation around α6 the deposition maximizes; at about α5 the stoichiometry of the film is the most close to that of the target; around α4 the parallel component of magnetostrictive coefficient, λ//, measure by Tam method, can reach 970×10-6 and 710×10-6 in a high and low field of 0.57 T and 0.25 T, respectively.
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Vacuum Science and Technology
ISSN: 0253-9748
Year: 2004
Issue: 5
Volume: 24
Page: 367-371
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ESI Highly Cited Papers on the List: 0 Unfold All
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30 Days PV: 2
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