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Heterojunction phototransistor (HPT) can produce high current gain and its fabrication process is compatible with that of heterojunction bipolar transistor (HBT). In this paper, a HPT-type Ge quantum dot photodetector with Ge-dot multilayers incorporated in the base-collector junction was grown by UHV/CVD. TEM and DCXRD measurement showed good crystal quality of the material. Then a two-terminal HPT-type Ge quantum dot photodetector was fabricated to improve its emitter efficiency with a heavily doped polysilicon layer as the emitter. At room temperature, I-V measurement showed that the dark current density of the HPT-type Ge quantum dot photodetector was low and the breakdown voltage was high. Under-8V bias, a photo-responsivity of 4.47 mA/W and 0.11 mA/W was achieved at 1.31 μm and 1.55 μm, respectively. Compared with a reference PIN detector with the same quantum dot layer, the responsivity was improved by a factor of 104 and 78 at 1.31 μm and 1.55 μm, respectively.
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Infrared and Laser Engineering
ISSN: 1007-2276
CN: 12-1261/TN
Year: 2011
Issue: 5
Volume: 40
Page: 791-794
Cited Count:
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 3
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