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High Performance Ge FinFET CMOS Invertor with ION=2.0 mA/ m at VOV=1V,S.S.=64 mV/dec,ION/IOFF=2.5 106, and Voltage Gain=90 V/V by Using High Pressure Supercritical Fluid Hydroxide Oxidation

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author:

Wu, Cheng-Yu (Wu, Cheng-Yu.) [1] | Ruan, Dun-Bao (Ruan, Dun-Bao.) [2] | Chang-Liao, Kuei-Shu (Chang-Liao, Kuei-Shu.) [3] | Unfold

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Abstract:

A high performance Ge FinFET CMOS invertor with ION=2mA/ m at VOV =1V,S.S.=64mV/dec,ION/IOFF=2.5 106 , and voltage gain=90 V/V is achieved by a high pressure supercritical fluid hydroxide oxidation, due to the reduced unstable oxidation states and oxygen vacancy. © 2023 JSAP.

Keyword:

CMOS integrated circuits Effluent treatment FinFET Gain measurement Germanium Ions Oxidation Supercritical fluids

Community:

  • [ 1 ] [Wu, Cheng-Yu]National Tsing Hua University, Department of Engineering and System Science, Taiwan
  • [ 2 ] [Ruan, Dun-Bao]College of Physics and Information Engineering, Fuzhou University, China
  • [ 3 ] [Chang-Liao, Kuei-Shu]National Tsing Hua University, Department of Engineering and System Science, Taiwan
  • [ 4 ] [Lee, Yao-Jen]Taiwan Semiconductor Research Institute, Taiwan
  • [ 5 ] [Chiu, Yu-Chuan]Institute of Electro-Optical Engineering, National Yang Ming Chiao Tung University, Department of Photonics, Taiwan
  • [ 6 ] [Liu, Chih-Wei]National Tsing Hua University, Department of Engineering and System Science, Taiwan
  • [ 7 ] [Liu, Guan-Ting]National Tsing Hua University, Department of Engineering and System Science, Taiwan
  • [ 8 ] [Kuo, Bo-Lien]National Tsing Hua University, Department of Engineering and System Science, Taiwan
  • [ 9 ] [Yang, Kai-Chun]National Tsing Hua University, Department of Engineering and System Science, Taiwan
  • [ 10 ] [Li, Cheng-Han]National Tsing Hua University, Department of Engineering and System Science, Taiwan
  • [ 11 ] [Liu, Po-Tsun]Institute of Electro-Optical Engineering, National Yang Ming Chiao Tung University, Department of Photonics, Taiwan

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Year: 2023

Page: 23-24

Language: English

Cited Count:

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30 Days PV: 3

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