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[期刊论文]

Inkjet-Printed In-Ga-Zn Oxide Thin-Film Transistors with Laser Spike Annealing

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author:

Huang, Hang (Huang, Hang.) [1] | Hu, Hailong (Hu, Hailong.) [2] (Scholars:胡海龙) | Zhu, Jingguang (Zhu, Jingguang.) [3] | Unfold

Indexed by:

EI Scopus SCIE

Abstract:

Inkjet-printed In-Ga-Zn oxide (IGZO) thin-film transistors (TFTs) have been fabricated at low temperature using laser spike annealing (LSA) treatment. Coffee-ring effects during the printing process were eliminated to form uniform IGZO films by simply increasing the concentration of solute in the ink. The impact of LSA on the TFT performance was studied. The field-effect mobility, threshold voltage, and on/off current ratio were greatly influenced by the LSA treatment. With laser scanning at 1 mm/s for 40 times, the 30-nm-thick IGZO TFT baked at 200A degrees C showed mobility of 1.5 cm(2)/V s, threshold voltage of -8.5 V, and on/off current ratio > 10(6). Our findings demonstrate the feasibility of rapid LSA treatment of low-temperature inkjet-printed oxide semiconductor transistors, being comparable to those obtained by conventional high-temperature annealing.

Keyword:

Indium-gallium-zinc oxide inkjet printing laser spike annealing low temperature thin-film transistors

Community:

  • [ 1 ] [Huang, Hang]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350002, Peoples R China
  • [ 2 ] [Hu, Hailong]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350002, Peoples R China
  • [ 3 ] [Zhu, Jingguang]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350002, Peoples R China
  • [ 4 ] [Guo, Tailiang]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350002, Peoples R China

Reprint 's Address:

  • 胡海龙

    [Hu, Hailong]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350002, Peoples R China

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Related Article:

Source :

JOURNAL OF ELECTRONIC MATERIALS

ISSN: 0361-5235

Year: 2017

Issue: 7

Volume: 46

Page: 4497-4502

1 . 5 6 6

JCR@2017

2 . 2 0 0

JCR@2023

ESI Discipline: MATERIALS SCIENCE;

ESI HC Threshold:306

JCR Journal Grade:3

CAS Journal Grade:4

Cited Count:

WoS CC Cited Count: 21

SCOPUS Cited Count: 22

30 Days PV: 2

操作日志

管理员  2024-08-14 13:29:25  更新被引

管理员  2024-08-14 13:29:25  更新被引

管理员  2020-11-13 00:08:57  创建

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