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author:

Fang, Xiubo (Fang, Xiubo.) [1] | Pan, Kui (Pan, Kui.) [2] | Xia, Tianwen (Xia, Tianwen.) [3] | Chen, Qinzhong (Chen, Qinzhong.) [4] | Zhang, Ke (Zhang, Ke.) [5] | Hou, Qinglong (Hou, Qinglong.) [6] | Wu, Yongsheng (Wu, Yongsheng.) [7] | Liu, Hengshan (Liu, Hengshan.) [8] | Sun, Jie (Sun, Jie.) [9] | Yan, Qun (Yan, Qun.) [10] | Guo, Tailiang (Guo, Tailiang.) [11]

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EI Scopus

Abstract:

GaN materials have attracted great interest and have demonstrated remarkable potential in many fields. When growing GaN materials, substrate selection is of great importance. By virtue of their nominally unlimited size, easy removal, and excellent thermal conduction, metal substrates have been suggested as an alternative to the commonly used substrates such as sapphire. GaN growth on metal substrates, however, is still quite rare, and many aspects remain unexplored. This paper uses computational fluid dynamics to perform a three-dimensional numerical simulation of the GaNMOCVD reaction chamber. We investigated the influence of the graphite containers' rotational velocity and the metal matrix's temperature at various locations. When the pressure within the MOCVD chamber remains constant, increasing the graphite tray's rotational velocity enhances the temperature field distribution within the chamber. However, the flow field becomes unstable when the rotation rate exceeds 1000 rpm. Our findings serve as a crucial benchmark for the future parameter optimization of MOCVD growth of GaN on metals. © 2024 John Wiley and Sons Inc. All rights reserved.

Keyword:

Computational fluid dynamics Gallium nitride Graphite III-V semiconductors Metal substrates Numerical models Rotation rate Sapphire

Community:

  • [ 1 ] [Fang, Xiubo]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fuzhou University, and Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 2 ] [Pan, Kui]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fuzhou University, and Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 3 ] [Xia, Tianwen]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fuzhou University, and Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 4 ] [Chen, Qinzhong]Fujian Acetron New Materials Co. Ltd, Fuzhou; 350000, China
  • [ 5 ] [Zhang, Ke]Fujian Acetron New Materials Co. Ltd, Fuzhou; 350000, China
  • [ 6 ] [Hou, Qinglong]Fujian Acetron New Materials Co. Ltd, Fuzhou; 350000, China
  • [ 7 ] [Wu, Yongsheng]Fujian Prima Optoelectronics Co., Ltd., Fuzhou; 350000, China
  • [ 8 ] [Liu, Hengshan]Fujian Prima Optoelectronics Co., Ltd., Fuzhou; 350000, China
  • [ 9 ] [Sun, Jie]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fuzhou University, and Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 10 ] [Sun, Jie]Quantum Device Physics Laboratory, Department of Microtechnology and Nanoscience, Chalmers University of Technology, Gothenburg; 41296, Sweden
  • [ 11 ] [Yan, Qun]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fuzhou University, and Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 12 ] [Yan, Qun]Rich Sense Electronics Technology Inc., Jinjiang; 362200, China
  • [ 13 ] [Guo, Tailiang]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fuzhou University, and Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China

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ISSN: 0097-966X

Year: 2024

Issue: S1

Volume: 55

Page: 1059-1063

Language: English

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 1

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