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author:

Pan, K. (Pan, K..) [1] | Zhang, K. (Zhang, K..) [2] | Deng, L. (Deng, L..) [3] | Lin, C. (Lin, C..) [4] | Li, Y. (Li, Y..) [5] | Liu, H. (Liu, H..) [6] | Zhang, F. (Zhang, F..) [7] | Nie, J. (Nie, J..) [8] | Sun, J. (Sun, J..) [9] | Su, A. (Su, A..) [10] | Chen, N. (Chen, N..) [11] | Zhou, J. (Zhou, J..) [12] | Yan, Q. (Yan, Q..) [13] | Guo, T. (Guo, T..) [14]

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Scopus

Abstract:

Optoelectronic devices, such as light-emitting diodes (LEDs), based on GaN-based semiconductor compounds are widely used for their advantages of long life, high reliability, and low energy consumption. The persistent challenge is integrating LED with transistors to achieve smaller size, lighter weight, higher speed, and more reliable optoelectronic integrated circuits. Here, we report monolithically and vertically integrated LED-on-FET devices fabricated on a novel GaN epitaxial structure. The designed device structure and fabrication process are simple. It also eliminates the extra area occupied by the transistor, and the shared n-GaN layer between the LED and FET reduces interconnect resistance and improves reliability. The measured threshold voltage ( $\textit{V}_{\text{Th}}$ ) of the LED-on-FET device is extrapolated as 3.9 V at the voltage ( $\textit{V}_{\text{DD}}$ ) of 5 V, and  $\textit{V}_{\text{Th}}$  decreases with the increase of  $\textit{V}_{\text{DD}}$ . More importantly, the gate voltage ( $\textit{V}_{\text{GS}}$ ) shows good performance in modulated electroluminescence (EL) intensity and switching capability of the LED. The integrated LED efficiently emits light modulation with a wavelength of 440 nm at  $\textit{V}_{\text{DD}}$   $=$  9 V and  $\textit{V}_{\textit{GS}}$   $=$  4–9 V (step  $=$  1 V), which are necessary for devices in applications, such as displays and smart lighting. This epitaxy structure and integration scheme is promising in achieving large-scale optoelectronic integrated circuits, such as the next-generation micro-LED and nano-LED with super compact integrated drivers. IEEE

Keyword:

Epitaxial growth Field-effect transistor (FET) Field effect transistors Indium tin oxide light-emitting diode (LED) Light emitting diodes Logic gates monolithically and vertically integrated Reliability Substrates

Community:

  • [ 1 ] [Pan K.]College of Physics and Information Engineering, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou University, Fuzhou, China
  • [ 2 ] [Zhang K.]College of Physics and Information Engineering, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou University, Fuzhou, China
  • [ 3 ] [Deng L.]College of Physics and Information Engineering, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou University, Fuzhou, China
  • [ 4 ] [Lin C.]College of Physics and Information Engineering, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou University, Fuzhou, China
  • [ 5 ] [Li Y.]College of Physics and Information Engineering, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou University, Fuzhou, China
  • [ 6 ] [Liu H.]Fujian Prima Optoelectronics Company Ltd, Fuzhou, China
  • [ 7 ] [Zhang F.]Fujian Prima Optoelectronics Company Ltd, Fuzhou, China
  • [ 8 ] [Nie J.]College of Physics and Information Engineering, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou University, Fuzhou, China
  • [ 9 ] [Sun J.]College of Physics and Information Engineering, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou University, Fuzhou, China
  • [ 10 ] [Su A.]Changsha Xiangji Haidun Technology Company Ltd, Changsha, China
  • [ 11 ] [Chen N.]Changsha Xiangji Haidun Technology Company Ltd, Changsha, China
  • [ 12 ] [Zhou J.]Changsha Xiangji Haidun Technology Company Ltd, Changsha, China
  • [ 13 ] [Yan Q.]College of Physics and Information Engineering, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou University, Fuzhou, China
  • [ 14 ] [Guo T.]College of Physics and Information Engineering, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou University, Fuzhou, China

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Source :

IEEE Transactions on Electron Devices

ISSN: 0018-9383

Year: 2023

Page: 1-6

2 . 9

JCR@2023

2 . 9 0 0

JCR@2023

JCR Journal Grade:2

CAS Journal Grade:2

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 0

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