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author:

Xiong, Fangzhu (Xiong, Fangzhu.) [1] | Sun, Jie (Sun, Jie.) [2] (Scholars:孙捷) | Tang, Penghao (Tang, Penghao.) [3] | Guo, Weiling (Guo, Weiling.) [4] | Dong, Yibo (Dong, Yibo.) [5] | Du, Zaifa (Du, Zaifa.) [6] | Feng, Shiwei (Feng, Shiwei.) [7] | Li, Xuan (Li, Xuan.) [8]

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EI Scopus SCIE

Abstract:

A technique for the transfer-free growth of 2-inch wafer-scale patterned graphene directly on GaN LED epilayers is introduced. High-quality graphene as transparent electrodes and heat spreaders is synthesized directly on GaN by PECVD at only 600 degrees C deposition temperature and within 3 min growth time. Co acts as both the catalyst for graphene growth and the dry etching mask for GaN mesas, which greatly improves the efficiency of the semiconductor device process. Elegantly, the graphene growth is in accordance with the shape of Co, which offers a lithography-free patterning technique of the graphene. Afterward, using our penetration etching method through the PMMA and graphene layers, the Co is peacefully removed, and in-situ Ohmic contact is achieved between the graphene and p-GaN where the contact resistivity is only 0.421 Omega cm(2). The graphene sheet resistance is as low as 631.2 Omega sq(-1). The device is also superior to the counterpart graphene-free LED in terms of heat spreading behavior, as evidenced by the lower junction temperature and thermal resistance. Most importantly, the developed technique produces graphene with excellent performance and is intrinsically more scalable, controllable, and semiconductor industry compatible than traditionally transferred graphene.

Keyword:

Community:

  • [ 1 ] [Xiong, Fangzhu]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing, Peoples R China
  • [ 2 ] [Tang, Penghao]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing, Peoples R China
  • [ 3 ] [Guo, Weiling]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing, Peoples R China
  • [ 4 ] [Dong, Yibo]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing, Peoples R China
  • [ 5 ] [Du, Zaifa]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing, Peoples R China
  • [ 6 ] [Feng, Shiwei]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing, Peoples R China
  • [ 7 ] [Li, Xuan]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing, Peoples R China
  • [ 8 ] [Sun, Jie]Fuzhou Univ, Coll Phys & Informat Engn, Fujian Sci & Technol Innovat Lab Optoelect Informa, Fuzhou, Peoples R China
  • [ 9 ] [Sun, Jie]Fuzhou Univ, Coll Phys & Informat Engn, Natl & Local United Engn Lab Flat Panel Display Te, Fuzhou, Peoples R China
  • [ 10 ] [Sun, Jie]Chalmers Univ Technol, Dept Microtechnol & Nanosci, Quantum Device Phys Lab, Gothenburg, Sweden

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Source :

NPJ 2D MATERIALS AND APPLICATIONS

ISSN: 2397-7132

Year: 2023

Issue: 1

Volume: 7

9 . 2

JCR@2023

9 . 2 0 0

JCR@2023

JCR Journal Grade:1

CAS Journal Grade:2

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 0

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