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author:

Chen, Cihai (Chen, Cihai.) [1] | Chen, Qizhen (Chen, Qizhen.) [2] | Yang, Qian (Yang, Qian.) [3] | Chen, Huipeng (Chen, Huipeng.) [4] | Guo, Tailiang (Guo, Tailiang.) [5]

Indexed by:

EI

Abstract:

Developing p-type oxide thin-film transistors (TFTs) is an essential path for further application in complementary metal oxide semiconductor (CMOS) components. However, the inferior electrical performance of p-type MO TFTs compared to n-type TFTs remains an ongoing challenge. Herein, for the first time, a low temperature, facile material engineering approach by incorporating n-type nanoparticles (NPs) was proposed for preparing p-type transparent NiOx TFTs. The characteristics of thin films blending NPs and the electrical performances of TFTs were investigated. The field effect mobility of TFTs with doping was nearly 20 times higher than pristine TFTs without doping, which was mainly beneficial from the suitable band alignment between NPs and p-type oxide, the increasing Ni3+ oxidation state in NiOx, as well as the improved dielectric/semiconductor interface quality. Electrons from drain electrode injected into metal oxide turn accepted in NPs rather than being trapped in the dielectric/semiconductor interface due to a strong surface electron depletion effect of NPs. NPs with small particle size and appropriate concentration would promote continuous hole transport by electrons transferring and reducing the interface trap state. The facile material engineering strategy is a promising technique for preparing p-type transparent MO-TFTs at low temperature, which showed great potential to be applicable in CMOS circuits on flexible substrates. © 2023 Author(s).

Keyword:

Blending CMOS integrated circuits Field effect transistors Flexible electronics Hole concentration Interface states MOS devices Nanoparticles Nickel oxide Oxide semiconductors Particle size Semiconductor doping Temperature Thin film circuits Thin films Thin film transistors

Community:

  • [ 1 ] [Chen, Cihai]College of Physics and Information Engineering, Minnan Normal University, Zhangzhou; 363000, China
  • [ 2 ] [Chen, Cihai]Institute of Optoelectronic Display, National and Local United Engineering Lab of Flat Panel Display Technology, Fuzhou University, Fuzhou; 350002, China
  • [ 3 ] [Chen, Qizhen]Institute of Optoelectronic Display, National and Local United Engineering Lab of Flat Panel Display Technology, Fuzhou University, Fuzhou; 350002, China
  • [ 4 ] [Yang, Qian]Institute of Optoelectronic Display, National and Local United Engineering Lab of Flat Panel Display Technology, Fuzhou University, Fuzhou; 350002, China
  • [ 5 ] [Chen, Huipeng]Institute of Optoelectronic Display, National and Local United Engineering Lab of Flat Panel Display Technology, Fuzhou University, Fuzhou; 350002, China
  • [ 6 ] [Chen, Huipeng]Fujian Science and Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
  • [ 7 ] [Guo, Tailiang]Institute of Optoelectronic Display, National and Local United Engineering Lab of Flat Panel Display Technology, Fuzhou University, Fuzhou; 350002, China
  • [ 8 ] [Guo, Tailiang]Fujian Science and Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China

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Source :

Journal of Applied Physics

ISSN: 0021-8979

Year: 2023

Issue: 5

Volume: 133

2 . 7

JCR@2023

2 . 7 0 0

JCR@2023

ESI HC Threshold:30

JCR Journal Grade:2

CAS Journal Grade:3

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 0

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