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author:

Xiong, Fangzhu (Xiong, Fangzhu.) [1] | Sun, Jie (Sun, Jie.) [2] (Scholars:孙捷) | Cole, Matthew T. (Cole, Matthew T..) [3] | Guo, Weiling (Guo, Weiling.) [4] | Yan, Chunli (Yan, Chunli.) [5] | Dong, Yibo (Dong, Yibo.) [6] | Wang, Le (Wang, Le.) [7] | Du, Zaifa (Du, Zaifa.) [8] | Feng, Shiwei (Feng, Shiwei.) [9] | Li, Xuan (Li, Xuan.) [10] | Guo, Tailiang (Guo, Tailiang.) [11] (Scholars:郭太良) | Yan, Qun (Yan, Qun.) [12]

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SCIE

Abstract:

Currently, applying graphene on GaN based electronic devices requires the troublesome, manual, lengthy, and irreproducible graphene transfer procedures, making it infeasible for real applications. Here, a semiconductor industry compatible technique for the in situ growth of patterned graphene directly onto GaN LED epiwafers for transparent heat-spreading electrode application is introduced. Pre-patterned sacrificial Co acts as both an etching mask for the GaN mesa and a catalyst for graphene growth. The Co helps in catalyzing the hydrocarbon decomposition and the subsequent graphitization, and is removed by wet etching afterwards. The use of plasma enhancement in the graphene chemical vapor deposition reduces the growth temperature to as low as 600 degrees C and improves the graphene quality, where highly crystalline graphene can be obtained in just 2 min of deposition. This method reduces the exposure of the GaN epilayers to high temperature to its limit, avoiding the well-known GaN decomposition and In segregation problems. Importantly, it can directly pattern the graphene without using additional lithographic steps and in doing so avoids any unintentional deleterious doping and damage of graphene from contact with the photoresist. The approach simplifies the fabrication and enables mass production by eliminating the bottlenecks of graphene transfer and patterning procedures. By comparing the GaN LEDs with and without graphene, we find that graphene greatly improves the device optical, electrical and thermal performances, due to the high optical transparency (91.74%) and high heat spreading capability of the graphene electrode. Unlike transferred graphene, this method is intrinsically scalable, reproducible, and compatible with the planar process, and is beneficial to the industrialization of GaN-graphene optoelectronic devices, where the integrated graphene serves as a superior sustainable and functional substitute to other transparent conducting materials such as ITO.

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Community:

  • [ 1 ] [Xiong, Fangzhu]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 2 ] [Guo, Weiling]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 3 ] [Dong, Yibo]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 4 ] [Wang, Le]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 5 ] [Du, Zaifa]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 6 ] [Feng, Shiwei]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 7 ] [Li, Xuan]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 8 ] [Sun, Jie]Fuzhou Univ, Fujian Sci & Technol Innovat Lab Optoelect Inform, Fuzhou 350100, Peoples R China
  • [ 9 ] [Guo, Tailiang]Fuzhou Univ, Fujian Sci & Technol Innovat Lab Optoelect Inform, Fuzhou 350100, Peoples R China
  • [ 10 ] [Yan, Qun]Fuzhou Univ, Fujian Sci & Technol Innovat Lab Optoelect Inform, Fuzhou 350100, Peoples R China
  • [ 11 ] [Sun, Jie]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350100, Peoples R China
  • [ 12 ] [Guo, Tailiang]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350100, Peoples R China
  • [ 13 ] [Yan, Qun]Fuzhou Univ, Coll Phys & Informat Engn, Fuzhou 350100, Peoples R China
  • [ 14 ] [Cole, Matthew T.]Univ Bath, Dept Elect & Elect Engn, Bath BA12 0BN, Avon, England
  • [ 15 ] [Yan, Chunli]Lib Fuzhou Univ, Dept Informat & Automat, Fuzhou 350108, Peoples R China

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Source :

JOURNAL OF MATERIALS CHEMISTRY C

ISSN: 2050-7526

Year: 2022

Issue: 17

Volume: 10

Page: 6794-6804

6 . 4

JCR@2022

5 . 7 0 0

JCR@2023

ESI Discipline: MATERIALS SCIENCE;

ESI HC Threshold:91

JCR Journal Grade:1

CAS Journal Grade:2

Cited Count:

WoS CC Cited Count: 2

SCOPUS Cited Count: 2

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 1

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