This　paper　presents　an　output　offset　minimized　capacitance-to-digital　interface　for　a　MEMS　accelerometer.　With　a　gain-enhanced　voltage-controlled　oscillator　(VCO)-based　quantization　loop,　the　interface　is　able　to　output　a　digital　signal　with　improved　dynamic　range.　For　optimizing　the　output　offset　caused　by　nonideal　factors　(e.g.,　the　bond-wire　drift),　a　nested　digital　chopping　feedback　loop　is　embedded　in　the　VCO-based　quantization　loop.　It　enables　the　interface　to　minimize　the　output　offset　without　digital　filtering　and　digital-to-analog　conversion.　The　proposed　architecture　is　well　suited　for　dynamic　range　and　offset　improvements　with　low　cost.　Fabricated　with　a　0.18　mu　m　Global　Foundry　(GF)　CMOS　process,　the　interface　offers　a　78　dB　dynamic　range　with　0.4%　nonlinearity　from　a　single　2　V　supply.　With　the　input　referred　offset　up　to　1.3　pF,　the　offset　cancellation　loop　keeps　the　DC　output　offset　within　40　mV.　The　power　dissipation　is　6.5　mW　with　a　bandwidth　of　4　kHz.