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Abstract:
采用磁控溅射制备SnO2薄膜气敏元件,测试了气敏元件的性能,研究了SnO2薄膜气敏元件薄膜厚度、元件加热功率和环境温度和湿度对元件的影响,气敏元件具有很好的灵敏度和选择性特性,对其敏感机理进行了探讨.
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Source :
传感器技术
ISSN: 1000-9787
Year: 2003
Issue: 1
Volume: 22
Page: 61-64
Cited Count:
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 1
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