To　enhance　the　stability　of　packaged　high-g　MEMS　accelerometers　with　double　cantilevers　positioned　asymmetrically,　the　dynamic　shock　responses　of　components　versus　impurity　concentration　of　piezoresistors　at　various　working　temperatures　have　been　probed　by　using　Finite　Element　Method　(FEM).　Results　indicate　that　the　dynamic　output　responses　of　component　are　actually　the　superposition　of　the　forced　vibrations　with　dynamic　shock　and　those　of　cantilevers　in　their　eigenfrequency.　The　dynamic　responses　of　components　are　sensitive　to　the　working　temperature.　With　the　increase　of　working　temperature,　the　inherent　frequency　vibrations　of　the　cantilevers　are　depressed　gradually.　Moreover,　the　larger　the　difference　between　the　working　temperature　and　reference　temperature,　the　more　obvious　the　impurity　effect　of　piezoresistors;　is.　The　difference　between　the　peak　output　voltage　of　response　under　1　x　10(18)　cm(-3)　and　that　under　1　x　10(21)　cm(-3)　varies　greatly　from　-2.2146　mV　at　T　=　0　degrees　C　to　8.6609　mV　at　T　=　100　degrees　C,　of　course,　is　partly　due　to　the　characteristic　variation　of　damping　media　under　various　working　temperatures.　Therefore,　to　improve　the　stability　of　component　and　further　weaken　the　impurity　concentration　effect　and　the　temperature　effect　of　piezoresistors　on　the　performance　of　components,　it　is　necessary　to　increase　the　impurity　concentration　of　piezoresistors　and　keep　the　components　working　at　relatively　lower　temperature　only　if　the　electro-performance　of　component　is　satisfied.　(C)　2009　Elsevier　Ltd.　All　rights　reserved.