We　have　presented　an　organic　polymer-fullerene　solar　cell　with　molybdenum　oxide　(MoOx)　film　prepared　by　direct　current　magnetron　sputtering　(sMoO(x))　and　thermal　evaporation　(eMoO(x))　as　a　hole　transport　layer　(HTL),　respectively.　The　result　shows　that　best　power　conversion　efficiency　(PCE)　of　the　device　using　sMoO(x)　as　HTL　is　3.84　%,　while　the　PCE　of　the　devices　with　eMoO(x)　film　is　3.33　%.　The　intrinsic　mechanisms　behind　the　PCE　difference　were　studied　by　analyzing　the　morphology,　electrical　and　optical　properties　of　MoOx　thin　films　prepared　by　the　different　methods.　The　higher　PCE　obtained　in　the　cells　with　sMoO(x)　may　be　due　to　the　smoother　interface　and　higher　absorption　of　the　active　layer.