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author：

Zhu, X. (Zhu, X..) [1] | Lang, T. (Lang, T..) [2] | Lin, X. (Lin, X..) [3] | Huang, X. (Huang, X..) [4] | Xie, Y. (Xie, Y..) [5] | Li, Y. (Li, Y..) [6] | Zhou, Y. (Zhou, Y..) [7] | Yang, Y. (Yang, Y..) [8] | Lin, C. (Lin, C..) [9] | Sun, J. (Sun, J..) [10] | Zhou, X. (Zhou, X..) [11] | Guo, T. (Guo, T..) [12] | Yan, Q. (Yan, Q..) [13]

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Scopus

Abstract：

Background:　Recently,　micro-light-emitting　diode　(micro-LED)　displays　have　gained　significant　interest　from　both　industry　and　academia　due　to　their　exceptional　performance.　However,　the　integration　of　micro-LED　with　the　driver　substrate　during　the　fabrication　process　remains　a　pressing　issue　that　needs　to　be　addressed.　Aim:　We　plan　to　realize　high-yield　bonding　of　micro-LED　displays　by　adopting　new　materials.　Approach:　We　opted　for　a　photoresist　with　conductive　properties　by　incorporating　carbon　black　as　the　bonding　material　to　fabricate　a　micron-level　bump　array.　Results:　This　method,　using　only　photolithography,　achieves　a　yield　of　99.99%　or　higher　in　a　single　step.　It　eliminates　the　need　for　time-consuming　processes　such　as　lift-off　and　vaporization　in　the　traditional　metal　bump　preparation　process.　The　resulting　array　can　be　directly　used　to　establish　electrical　connections　with　the　micro-LED　array.　After　fabrication　of　the　bump　array　on　the　thin　film　transistor　(TFT)　driver　substrate,　the　80　×　80　micro-LED　array　was　integrated　into　the　TFT　substrate,　and　after　baking,　a　device　yield　of　over　99.9%　was　attained.　Conclusions:　This　work　presents　a　streamlined　and　more　effective　method　for　integrating　the　micro-LED　and　TFT　driver　substrate,　resulting　in　significant　reductions　in　both　time　and　economic　expenses　associated　with　the　production　process　of　micro-　LED　displays.　　©　2024　Society　of　Photo-Optical　Instrumentation　Engineers　(SPIE).

Keyword：

carbon black micro-bump array micro-light-emitting diode display photosensitive conductive polymer

Community：

  • [ 1 ] [Zhu X.]Fuzhou University, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou, China
  • [ 2 ] [Zhu X.]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou, China
  • [ 3 ] [Lang T.]Fuzhou University, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou, China
  • [ 4 ] [Lang T.]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou, China
  • [ 5 ] [Lin X.]Fuzhou University, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou, China
  • [ 6 ] [Lin X.]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou, China
  • [ 7 ] [Huang X.]Fuzhou University, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou, China
  • [ 8 ] [Huang X.]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou, China
  • [ 9 ] [Xie Y.]Fuzhou University, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou, China
  • [ 10 ] [Xie Y.]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou, China
  • [ 11 ] [Li Y.]Fuzhou University, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou, China
  • [ 12 ] [Li Y.]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou, China
  • [ 13 ] [Zhou Y.]Fuzhou University, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou, China
  • [ 14 ] [Zhou Y.]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou, China
  • [ 15 ] [Yang Y.]Fuzhou University, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou, China
  • [ 16 ] [Yang Y.]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou, China
  • [ 17 ] [Lin C.]Fuzhou University, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou, China
  • [ 18 ] [Lin C.]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou, China
  • [ 19 ] [Sun J.]Fuzhou University, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou, China
  • [ 20 ] [Sun J.]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou, China
  • [ 21 ] [Sun J.]Chalmers University of Technology, Department of Microtechnology and Nanoscience, Quantum Device Physics Laboratory, Gothenburg, Sweden
  • [ 22 ] [Zhou X.]Fuzhou University, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou, China
  • [ 23 ] [Zhou X.]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou, China
  • [ 24 ] [Guo T.]Fuzhou University, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou, China
  • [ 25 ] [Guo T.]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou, China
  • [ 26 ] [Yan Q.]Fuzhou University, National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou, China
  • [ 27 ] [Yan Q.]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou, China

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Source ：

Nanopatterning, Materials and Metrology

ISSN： 2708-8340

Year： 2024

Issue： 4

Volume： 23

Page： 44901-

Cited Count：

WoS CC Cited Count：

SCOPUS Cited Count：

ESI Highly Cited Papers on the List： 0 Unfold All

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Chinese Cited Count：

30 Days PV： 1

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