Investigation of ultrasmall sidewall-insulated GaN via with large aspect ratio for the strategy of vertically stacked full-color Micro-LEDs - Details

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Abstract：

Micro　light-emitting　diode　(Micro-LED)　is　considered　as　an　ideal　candidate　for　near-eye,　outdoor　display,　and　light　field　photography　applications.　At　present,　the　commercialization　of　full-color　Micro-LED　is　limited　by　the　mass　transfer　of　red,　green,　and　blue　(R-B-G)　sub-pixels.　Hence,　we　proposed　a　full-color　scheme　of　vertically　stacked　tricolor　Micro-LED　layers　to　avoid　mass　transfer,　which　owns　over　1000　PPI　(pixel　per　inch).　In　this　solution,　the　sidewall-insulated　via　in　the　epilayer　plays　a　critical　role　to　achieve　the　electrical　and　mechanical　integration　of　three　monochromatic　Micro-LEDs　with　Si-based　complementary　metal-oxide　semiconductor　(CMOS)　driver.　Therefore,　the　via　processes　of　GaN-based　epilayer　were　investigated　systematically　using　available　semiconductor　processes　in　this　article.　The　inductively　coupled　plasma　(ICP)　etching　was　employed　to　create　the　ultra-small　micro-structure　array　using　SiO2　thin　film　as　hard　mask.　Sidewall-insulated　vias　were　fabricated　with　different　aperture　sizes　(9.3,　7.5,　and　3.4　μm)　and　a　depth　of　about　4-μm.　The　vias　with　large　aspect　ratio　are　completely　satisfy　the　requirement　of　designed　vertical　interconnection.　This　study　aims　to　provide　valuable　reference　for　the　commercial　progress　of　high-resolution　and　full-color　Micro-LEDs.　©　2024　Elsevier　B.V.

Keyword：

Epilayers Gallium nitride Integrated circuit interconnects MOS devices Pixels Semiconducting gallium compounds Semiconducting indium phosphide Semiconducting silicon compounds Surface discharges

Community：

[ 1 ] [Li, Yang]College of Physics and Information Engineering, Fuzhou University, Fuzhou; 350100, China
[ 2 ] [Li, Yang]National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou University, Fuzhou; 350100, China
[ 3 ] [Li, Yang]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
[ 4 ] [Zhang, Kaixin]College of Physics and Information Engineering, Fuzhou University, Fuzhou; 350100, China
[ 5 ] [Zhang, Kaixin]National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou University, Fuzhou; 350100, China
[ 6 ] [Zhang, Kaixin]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
[ 7 ] [Yang, Tianxi]College of Physics and Information Engineering, Fuzhou University, Fuzhou; 350100, China
[ 8 ] [Yang, Tianxi]National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou University, Fuzhou; 350100, China
[ 9 ] [Yang, Tianxi]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
[ 10 ] [Nie, Junyang]TCL China Star Optoelectronics Technology Co., Ltd, Shenzhen; 518132, China
[ 11 ] [Li, Qiwei]College of Physics and Information Engineering, Fuzhou University, Fuzhou; 350100, China
[ 12 ] [Li, Qiwei]National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou University, Fuzhou; 350100, China
[ 13 ] [Li, Qiwei]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
[ 14 ] [Zhou, Yijian]College of Physics and Information Engineering, Fuzhou University, Fuzhou; 350100, China
[ 15 ] [Zhou, Yijian]National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou University, Fuzhou; 350100, China
[ 16 ] [Zhou, Yijian]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
[ 17 ] [Tao, Tao]Jiangsu Provincial Key Laboratory of Advanced Photonic and Electronic Materials, School of Electronic Science and Engineering. Nanjing University, Nanjing; 210093, China
[ 18 ] [Zhi, Ting]College of Electronic and Optical Engineering & College of Flexible Electronics, Nanjing University of Posts and Telecommunications, Nanjing; 210023, China
[ 19 ] [Yan, Qun]College of Physics and Information Engineering, Fuzhou University, Fuzhou; 350100, China
[ 20 ] [Yan, Qun]National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou University, Fuzhou; 350100, China
[ 21 ] [Yan, Qun]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
[ 22 ] [Sun, Jie]College of Physics and Information Engineering, Fuzhou University, Fuzhou; 350100, China
[ 23 ] [Sun, Jie]National and Local United Engineering Laboratory of Flat Panel Display Technology, Fuzhou University, Fuzhou; 350100, China
[ 24 ] [Sun, Jie]Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China

Reprint 's Address：

[zhang, kaixin]fujian science & technology innovation laboratory for optoelectronic information of china, fuzhou; 350100, china;;[zhang, kaixin]national and local united engineering laboratory of flat panel display technology, fuzhou university, fuzhou; 350100, china;;[zhang, kaixin]college of physics and information engineering, fuzhou university, fuzhou; 350100, china;;

Email：

316964@fzu.edu.cnjie.sun@fzu.edu.cn

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