Electroless deposition of nickel microbumps for fine-pith flip-chip bonding - Details

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EI Scopus

Abstract：

The　reliability　of　micro-light-emitting　diode　(Micro-LED)　is　closely　associated　with　the　uniformity　of　microbumps　arrays.　With　continual　decreases　in　pixel　pitch　in　recent　years,　it　is　a　challenge　to　guarantee　the　uniformity　of　bump　arrays.　To　satisfy　current　requirements　for　ultra-high-density　interconnections,　this　study　proposes　an　electroless　plating　method　for　fabricating　highly　uniform　nickel　microbumps.　This　technique　differs　from　electroplating,　in　which　the　morphology　and　consistency　of　microbumps　can　be　easily　controlled.　Furthermore,　it　is　a　high-selectivity　and　cost-effective　method　of　microbumps　fabrication　that　eliminates　solder　wastage　and　avoids　metal　lift-off　in　traditional　evaporation.　To　minimize　the　non-uniformity　of　the　bumps,　we　aim　to　optimize　the　oxygen　plasma　treatment　parameters　and　deposition　intervals　to　eliminate　the　issues　of　skip　plating,　hydrogen　bubble　entrapment,　and　nodules.　Under　the　combined　effect　of　plasma　treatment　and　intermittent　deposition　method,　microbump　arrays　with　less　than　5%　uniformity　were　successfully　prepared,　achieving　the　demands　of　high-density　bonding.　In　addition,　the　preparation　process　is　highly　reproducible,　extending　the　application　range　of　this　technique.　©　Published　under　licence　by　IOP　Publishing　Ltd.

Keyword：

Cost effectiveness Electroless plating Flip chip devices Nickel Plasma applications

Community：

[ 1 ] [Lu, Yu]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fuzhou University, Fuzhou; 350100, China
[ 2 ] [Lin, Chang]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fuzhou University, Fuzhou; 350100, China
[ 3 ] [Lin, Chang]Fujian Science and Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
[ 4 ] [Wang, Shuaishuai]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fuzhou University, Fuzhou; 350100, China
[ 5 ] [Zhang, Kaixin]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fuzhou University, Fuzhou; 350100, China
[ 6 ] [Lang, Taifu]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fuzhou University, Fuzhou; 350100, China
[ 7 ] [Li, Yang]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fuzhou University, Fuzhou; 350100, China
[ 8 ] [Li, Qiwei]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fuzhou University, Fuzhou; 350100, China
[ 9 ] [Yang, Tianxi]Fujian Science and Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
[ 10 ] [Huang, Zhonghang]Fujian Science and Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
[ 11 ] [Yan, Chunli]Department of Information and Automation, Fuzhou University, Fuzhou; 350108, China
[ 12 ] [Sun, Jie]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fuzhou University, Fuzhou; 350100, China
[ 13 ] [Sun, Jie]Fujian Science and Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China
[ 14 ] [Sun, Jie]Quantum Device Physics Laboratory, Department of Microtechnology and Nanoscience, Chalmers University of Technology, Gothenburg; 41296, Sweden
[ 15 ] [Yan, Qun]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fuzhou University, Fuzhou; 350100, China
[ 16 ] [Yan, Qun]Fujian Science and Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou; 350100, China