Computational investigation of a novel metal thickness measurement system with coaxial triple-coil sensor for chemical mechanical polishing (Apr, 10.1007/s00170-024-13677-7, 2024) - Details

author：

Wang, Chengxin (Wang, Chengxin.) ^[1] (Scholars：王成鑫) | Tian, Fangxin (Tian, Fangxin.) ^[2] | Wang, Tongqing (Wang, Tongqing.) ^[3] | Liu, Bangxu (Liu, Bangxu.) ^[4] | Lu, Xinchun (Lu, Xinchun.) ^[5]

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[ 1 ] [Wang, Chengxin]Tsinghua Univ, State Key Lab Tribol Adv Equipment, Beijing 100084, Peoples R China
[ 2 ] [Tian, Fangxin]Tsinghua Univ, State Key Lab Tribol Adv Equipment, Beijing 100084, Peoples R China
[ 3 ] [Wang, Tongqing]Tsinghua Univ, State Key Lab Tribol Adv Equipment, Beijing 100084, Peoples R China
[ 4 ] [Liu, Bangxu]Tsinghua Univ, State Key Lab Tribol Adv Equipment, Beijing 100084, Peoples R China
[ 5 ] [Lu, Xinchun]Tsinghua Univ, State Key Lab Tribol Adv Equipment, Beijing 100084, Peoples R China
[ 6 ] [Wang, Chengxin]Hwatsing Co Ltd, Tianjin 300350, Peoples R China
[ 7 ] [Tian, Fangxin]Hwatsing Co Ltd, Tianjin 300350, Peoples R China
[ 8 ] [Wang, Tongqing]Hwatsing Co Ltd, Tianjin 300350, Peoples R China
[ 9 ] [Lu, Xinchun]Hwatsing Co Ltd, Tianjin 300350, Peoples R China
[ 10 ] [Wang, Chengxin]Fuzhou Univ, Sch Mech Engn & Automat, Fuzhou 350116, Peoples R China

Reprint 's Address：

[Lu, Xinchun]Tsinghua Univ, State Key Lab Tribol Adv Equipment, Beijing 100084, Peoples R China;;[Lu, Xinchun]Hwatsing Co Ltd, Tianjin 300350, Peoples R China

Email：

wcx@fzu.edu.cn |
tfx17@mails.tsinghua.edu.cn |
wtq@mail.tsinghua.edu.cn |
liubx19@mails.tsinghua.edu.cn |
xclu@tsinghua.edu.cn

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Publisher Correction to: Computational investigation of a novel metal thickness measurement system with coaxial triple-coil sensor for chemical mechanical polishing (The International Journal of Advanced Manufacturing Technology, (2024), 10.1007/s00170-024-13677-7)
2024，International Journal of Advanced Manufacturing Technology

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Source ：

INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY

ISSN： 0268-3768

Year： 2024

Issue： 11-12

Volume： 132

Page： 5259-5260

2 . 9 0 0

JCR@2023

CAS Journal Grade：4

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ESI Highly Cited Papers on the List： 0 Unfold All

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30 Days PV： 2

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机械工程及自动化学院本学院/部未明确归属的数据

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