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author:

Li, F. (Li, F..) [1] | Yin, T. (Yin, T..) [2] | Wu, S. (Wu, S..) [3] | Deng, W. (Deng, W..) [4]

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Scopus

Abstract:

This paper presents a compact Micro-Electro-Mechanical System (MEMS) microphone digital readout system. The system is characterized by a low-dropout regulator (LDO) and a pre-amplifier and programmable-gain amplifier (PPA)-less voltage controlled oscillator (VCO)-based (Formula presented.) (Formula presented.) modulation technique, which improve compactness and design scalability. Specifically, to improve signal accuracy and maintain loop stability without a gain-tuning range trade-off, an active low pass filter (ALPF) and a current mode feed-forward path (CMFFP) are incorporated in a VCO-based delta-sigma modulation loop. By means of VCOs and SCG phase variation robustness and current source array feedback (CSAFB), the system achieves a high power supply rejection ratio (PSRR) and gain tuning without the need to design an extra regulator and PPA. The design was fabricated using a 180 nm Bipolar-CMOS-DMOS (BCD) process and measured at a 1.2 V supply voltage. According to the measurement results, the signal-to-noise and distortion ratio (SNDR) achieves 62 dB@1 kHz with 40 dB gain and a 10 kHz bandwidth. Furthermore, PSRR@1 kHz is below −55 dB, and power dissipation is within 57 µW. © 2023 by the authors.

Keyword:

microphone readout VCO ΔΣ modulator

Community:

  • [ 1 ] [Li F.]Department of Physics and Information Engineering, Fuzhou University, Fuzhou, 350108, China
  • [ 2 ] [Yin T.]Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, China
  • [ 3 ] [Yin T.]School of Microelectronics, University of Chinese Academy of Sciences, Beijing, 101408, China
  • [ 4 ] [Wu S.]Department of Physics and Information Engineering, Fuzhou University, Fuzhou, 350108, China
  • [ 5 ] [Deng W.]Department of Physics and Information Engineering, Fuzhou University, Fuzhou, 350108, China

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Source :

Electronics (Switzerland)

ISSN: 2079-9292

Year: 2023

Issue: 24

Volume: 12

1 . 7 6 4

JCR@2018

CAS Journal Grade:3

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 1

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