To　meet　ultra-high　density　requirement　of　next-generation　data　storage,　the　storage　performance　of　a　novel　self-made　nanomechanical　electro-thermal　probe　array　integrating　a　piezoresistive　sensor　and　a　resistance　heater　was　investigated.　Firstly,　the　electro-thermal　performance　and　sensitivity　characteristic　were　tested,　and　the　test　results　were　well　consistent　with　those　simulated.　After　studying　the　influences　of　pulse　voltage,　pulse　width　and　applied　force　on　the　data-writing,　about　31.　6GB/in2　data-recording　density　was　realized　successfully　on　PMMA　(polymethyl　methacrylate)　polymer　film　by　using　AFM(atomic　force　microscope)　equipment　with　the　optimized　thermal　writing　parameters.