In　the　paper,　series　samples　of　RuO2-SiO2　coated　titanium　were　prepared　by　the　Pechini　method.　The　molar　concentrations　of　the　binary　oxide　coatings　X%RuO2-Y%SiO2　were　denoted　as　RuxSiyO2.　Each　coating　was　prepared　through　painting,　sintering　and　annealing.　The　microstructure　of　the　coating　was　observed　by　SEM.　The　phase　structure　and　the　average　grain　size　of　the　coating　were　investigated　by　XRD.　It　is　demonstrated　that　rutile　RuO2　is　the　main　crystalline　phase　in　the　coatings.　The　added　Si　is　in　the　form　of　a　non-crystalline　SiO2　phase.　All　the　grain　sizes　in　Si-containing　samples　treated　at　450°C　are　not　larger　than　10　nm,　which　are　obvious　smaller　than　those　of　non-silicon　sample.　The　crystal　grains　show　their　thermal　stability.　The　average　grain　sizes　of　the　coatings　are　less　than　45nm,　even　after　annealed　at　800°C.　All　the　data　illustrate　that　the　adding　of　SiO2　can　obviously　not　only　make　the　phase　structure　stable　but　also　finer　the　grain　of　RuO2.　It　is　suggested　that　at　most　cases　SiO2　can　act　as　a　supporting　frame　to　hold　the　dispersed　RuO2　grains.