In　order　to　reduce　the　adhesive　contact　failure　happens　on　MEMS　products,　Some　influence　factors　are　considered,　including　the　adhesive　force　and　the　elastic-plastic　deformation　on　substrate,　and　the　adhesive　contact　failures　on　two　body　(with　different　probe　radius　and　cooper　substrate)　were　researched　by　molecular　dynamics　method　based　on　embedded　atom　potentials　and　verlet　algorithms.　Furthermore,　the　center-symmetric　parameter　are　applied　to　described　destruction　area　and　migration　path　changes　at　nano-scale.　This　research　works　found　that　the　adhesion　contact　force　was　not　affected　by　different　probe　radius　before　contacting　(the　displacement　≤1　nm).　As　probe　displacement　increased　(the　displacement　≤1　nm),　the　curvature　radius　of　diamond　have　an　significance　influence　on　adhesion　contact　force　curve.　It　also　found　that　the　larger　diamond　probe　radius　was,　the　more　elastic-plastic　deformation　intense　on　cooper　substrate,　and　the　contact　force　versus　displacement　presents　saw　tooth　situation　obviously,　which　result　the　substrate　was　destroyed　seriously,　so　that　a　large　number　of　atoms　were　adhered　on　diamond　probe　surface,　which　it　means　that　the　adhesive　contact　failure　and　adhesion　hysteresis　phenomenon　would　happened.　This　result　has　important　practical　significance　on　researching　the　mechanism　of　adhesion　contact　failures　and　designing　device　products　surface　profile　on　MEMS　products.　©　2018,　Chongqing　Wujiu　Periodicals　Press.　All　rights　reserved.