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学者姓名：林杰文
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Abstract ：
Accurate rotational speed measurement is a prerequisite for realizing the condition monitoring and fault diagnosis of rotating equipment. This study proposes a novel rotational speed measurement method based on optical coherent displacement measurement. An optical coherence system is used to measure the relative depth of the shaft surface with uniformly etched micro-indentations on the circumferential surface. Fast Fourier transform (FFT) and the Hanning window energy centrobaric method (HnWECM) are used to process the collected photoelectric signals to obtain depth information and thereby realize the measurement of surface microindentations. During the operation, the rotational speed of the shaft is obtained by calculating the ratio of the angular difference between the relative depth of the rectangular pulses of the surface and the time interval. The experimental validation of the response is performed. The experimental results show that in the range of 0 rpm to 60 rpm, the indication error is <1 %, the nonlinearity error is <0.3584 %, and the repeatability error is <0.28 %. In the range of 0 rpm to 600 rpm, the rotational speed measurement method performed well with an indication error of <0.5 %, a maximum nonlinear error of 0.22 %, and a repeatability error of no >0.28 %. Compared with the results reported in existing literature, the proposed method offers advantages in terms of accuracy, linearity, and repeatability.
Keyword ：
FFT FFT Hanning window Hanning window Micro-indentation Micro-indentation Optical measurement Optical measurement Rotational speed measurement Rotational speed measurement
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| GB/T 7714 | Liang, Wei , Hong, Xiaodong , Huang, Dichang et al. Novel rotational speed measuring method based on micro-indentation-shaft detected by optical coherent system [J]. | OPTICS AND LASERS IN ENGINEERING , 2025 , 184 . |
| MLA | Liang, Wei et al. "Novel rotational speed measuring method based on micro-indentation-shaft detected by optical coherent system" . | OPTICS AND LASERS IN ENGINEERING 184 (2025) . |
| APA | Liang, Wei , Hong, Xiaodong , Huang, Dichang , Chen, Linnan , Zhong, Jianfeng , Zhang, Qiukun et al. Novel rotational speed measuring method based on micro-indentation-shaft detected by optical coherent system . | OPTICS AND LASERS IN ENGINEERING , 2025 , 184 . |
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Abstract ：
A nonlinear chirp is always introduced to an interference fringe in the Fourier domain optical coherence tomography (FD-OCT), which can be regarded as an amplitude-modulated and frequency-modulated nonstationary signal. It is mainly caused by the non-uniform wavenumber sampling and the dispersion mismatch between the sample and the reference arms. It results in the broadening of the axial point spread function and the degradation of the axial resolution. In this paper, the parameterized instantaneous frequency estimation method (PIFEM) is applied to estimate the phase function of the chirped interference fringe to achieve the linear resampling of the wavenumber space and the rebalance of the dispersion mismatch. The proposed method is efficient and convenient that requires only two interference fringes corresponding to a mirror at different depths in the sample arm of the FD-OCT system. In addition, it is proved that the PIFEM is adapted to compensate for the depthindependent dispersion mismatch caused by the sample comprised of layered structures. The experiment results validate the performance of the proposed method.
Keyword ：
Dispersion compensation Dispersion compensation estimation estimation Optical coherence tomography Optical coherence tomography Parameterized instantaneous frequency Parameterized instantaneous frequency Wavenumber calibration Wavenumber calibration
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| GB/T 7714 | Huang, Yuexin , Deng, Yaosen , Lin, Jiewen et al. Wavenumber calibration and dispersion compensation for Fourier domain optical coherence tomography by parameterized instantaneous frequency estimation method [J]. | OPTICS AND LASER TECHNOLOGY , 2024 , 174 . |
| MLA | Huang, Yuexin et al. "Wavenumber calibration and dispersion compensation for Fourier domain optical coherence tomography by parameterized instantaneous frequency estimation method" . | OPTICS AND LASER TECHNOLOGY 174 (2024) . |
| APA | Huang, Yuexin , Deng, Yaosen , Lin, Jiewen , Zhang, Qiukun , Zhong, Shuncong . Wavenumber calibration and dispersion compensation for Fourier domain optical coherence tomography by parameterized instantaneous frequency estimation method . | OPTICS AND LASER TECHNOLOGY , 2024 , 174 . |
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Abstract ：
The flatness of semiconductor substrates is an important parameter for evaluating the surface quality of semiconductor substrates. However, existing technology cannot simultaneously achieve high measurement efficiency, large-range thickness measurement, and nanometer-level measurement accuracy in the thickness measurement of semiconductor substrates. To solve the problems, we propose to apply the method that combines spectral-domain optical coherence tomography (SD-OCT) with the Hanning-windowed energy centrobaric method (HnWECM) to measure the thickness of semiconductor substrates. The method can be employed in the full-chip thickness measurement of a sapphire substrate, which has a millimeter measuring range, nanometer-level precision, and a sampling rate that can reach up to 80 kHz. In this contribution, we measured the full-chip thickness map of a sapphire substrate by using this method and analyzed the machining characteristics. The measurement results of a high-precision mechanical thickness gauge, which is widely used for thickness measurement in the wafer fabrication process, were compared with the proposed method. The difference between these two methods is 0.373%, which explains the accuracy of the applied method to some extent. The results of 10 sets of repeatability experiments on 250 measurement points show that the maximum relative standard deviation (RSD) at this point is 0.0061%, and the maximum fluctuation is 71.0 nm. The above experimental results prove that this method can achieve the high-precision thickness measurement of the sapphire substrate and is of great significance for improving the surface quality detection level of semiconductor substrates.
Keyword ：
HnWECM HnWECM SD-OCT SD-OCT semiconductor substrate semiconductor substrate spectral-domain interferometry spectral-domain interferometry thickness measurement thickness measurement
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| GB/T 7714 | Zhong, Shuncong , He, Renyu , Deng, Yaosen et al. High-Precision Semiconductor Substrate Thickness Gauge Based on Spectral-Domain Interferometry [J]. | PHOTONICS , 2024 , 11 (5) . |
| MLA | Zhong, Shuncong et al. "High-Precision Semiconductor Substrate Thickness Gauge Based on Spectral-Domain Interferometry" . | PHOTONICS 11 . 5 (2024) . |
| APA | Zhong, Shuncong , He, Renyu , Deng, Yaosen , Lin, Jiewen , Zhang, Qiukun . High-Precision Semiconductor Substrate Thickness Gauge Based on Spectral-Domain Interferometry . | PHOTONICS , 2024 , 11 (5) . |
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To accurately measure the surface roughness of precision parts, this paper proposes a non-destructive measurement method of surface roughness using frequency-domain interferometry as the core detection principle and the Hanning window energy center method as the signal demodulation method. The corresponding relationship between the height changes of the sample surface profile and the frequency density changes in the interference signal was established, and the Hanning window energy center method was used to accurately extract the periodic frequency, which can more accurately measure the surface roughness of the sample. After the spectrum correction method, the peak signal-to-noise ratio of the system reaches 50 similar to 60 dB. When the signal-tonoise ratio is 54.8, the theoretical measurement accuracy of the system reaches 5 nm. The vibration error generated during the actual measurement process is only 20 nm. The measurement results of the roughness measuring instrument were compared and analyzed. The experimental results showed that this system has higher measurement accuracy and accuracy, and the maximum repeatability error is 7 nm. To further verify the accuracy of the system, an atomic force microscope was used for comparison and verification. The difference between the two measurement results was 12 nm. This work provides a faster and more accurate non-destructive measurement method for surface roughness measurement.
Keyword ：
Frequency-domain interferometry Frequency-domain interferometry Hanning window energy center method Hanning window energy center method Surface roughness Surface roughness
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| GB/T 7714 | Zhang, Qiukun , Wang, Wenxuan , Zhong, Jialu et al. Nanoscale surface roughness measurement based on frequency-domain interferometry principle [J]. | OPTICS AND LASERS IN ENGINEERING , 2024 , 178 . |
| MLA | Zhang, Qiukun et al. "Nanoscale surface roughness measurement based on frequency-domain interferometry principle" . | OPTICS AND LASERS IN ENGINEERING 178 (2024) . |
| APA | Zhang, Qiukun , Wang, Wenxuan , Zhong, Jialu , Lin, Jiewen , Chen, Jinguo , Luo, Manting et al. Nanoscale surface roughness measurement based on frequency-domain interferometry principle . | OPTICS AND LASERS IN ENGINEERING , 2024 , 178 . |
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Abstract ：
本实用新型涉及一种基于光学干涉的自润滑轴承涂层厚度检测装置，该装置包括：钨卤素灯光源模块，用于发射光束；第一凸透镜，用于将钨卤素灯光源模块的发射光准直为平行光束；迈克尔逊干涉仪模块，用于将光束分束为强度相等的两束光，作为参考光、探测光分别汇聚于参考镜、待测轴承涂层表面，反射后重合发生干涉，形成干涉光束；以及二维光谱仪模块，包括反射镜、反射式光栅、柱透镜和面阵CCD相机，干涉光束经反射镜传播至反射式光栅，并按波长在空间分光后由柱透镜汇聚成干涉谱线，由面阵CCD相机采集获得二维干涉光谱条纹。该装置有利于获取自润滑轴承涂层厚度的二维干涉条纹图像，进而实现对自润滑轴承涂层厚度进行非接触无损检测。
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| GB/T 7714 | 黄异 , 钟舜聪 , 陈志雄 et al. 一种基于光学干涉的自润滑轴承涂层厚度检测装置 : CN202221788563.8[P]. | 2022-07-12 00:00:00 . |
| MLA | 黄异 et al. "一种基于光学干涉的自润滑轴承涂层厚度检测装置" : CN202221788563.8. | 2022-07-12 00:00:00 . |
| APA | 黄异 , 钟舜聪 , 陈志雄 , 庄彩虹 , 林杰文 , 张秋坤 et al. 一种基于光学干涉的自润滑轴承涂层厚度检测装置 : CN202221788563.8. | 2022-07-12 00:00:00 . |
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