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author:

Huang, Zhenxiang (Huang, Zhenxiang.) [1] | Cheng, Jie (Cheng, Jie.) [2] | Huang, Yating (Huang, Yating.) [3] | Wang, Chengxin (Wang, Chengxin.) [4] | Lv, Yaran (Lv, Yaran.) [5]

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EI Scopus

Abstract:

With the rapid advancement of machine learning technology, numerous algorithms have been employed to enhance the prediction accuracy of material removal rate (MRR). In this paper, a novel prediction framework is introduced based on a dynamic hypergraph attention mechanism, providing accurate MRR predictions. This approach utilizes the multi-level attention mechanism within the hypergraph architecture to effectively capture the relationships between nodes and hyperedges in the polishing machine, enabling precise MRR predictions, while maintaining a low data processing cost. Experimental results show that our method achieved an RMSE of 1.42 and an R2 of 0.963, outperforming current state-of-the-art models. © 2025 IEEE.

Keyword:

Chemical mechanical polishing Data handling Deep learning Distributed computer systems Dynamics Forecasting Integrated circuits Learning algorithms Learning systems Signal processing

Community:

  • [ 1 ] [Huang, Zhenxiang]China University of Mining & Technology-Beijing, School of Mechanical and Electrical Engineering, Beijing; 100083, China
  • [ 2 ] [Cheng, Jie]China University of Mining & Technology-Beijing, School of Mechanical and Electrical Engineering, Beijing; 100083, China
  • [ 3 ] [Huang, Yating]Beijing Technology and Business University, School of Computer and Artificial Intelligence, Beijing; 100048, China
  • [ 4 ] [Wang, Chengxin]Fuzhou University, School of Mechanical Engineering and Automation, Fuzhou; 350108, China
  • [ 5 ] [Lv, Yaran]China University of Mining & Technology-Beijing, School of Mechanical and Electrical Engineering, Beijing; 100083, China

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Year: 2025

Language: English

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