Amorphous Ga2O3-based solar-blind photodetectors on crystalline and amorphous substrates: A comparative study - Details

author：

Peng, K. (Peng, K..) ^[1] | Xue, D. (Xue, D..) ^[2] | Lin, W. (Lin, W..) ^[3] | Lv, P. (Lv, P..) ^[4] Unfold

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Abstract：

Amorphous　Ga2O3　thin　films　were　deposited　on　SiO2　and　sapphire　substrates　by　pulsed　magnetron　sputtering　(PSD)　at　room　temperature,　respectively.　Corresponding　amorphous　Ga2O3　thin　film　photodetectors　were　prepared.　The　oxygen　vacancies　and　defects　of　the　interface　between　films　and　substrates　were　found　to　determine　the　discrepancy　by　comparing　the　performance　between　these　two　photodetectors.　Amorphous　Ga2O3　photodetectors　on　SiO2　had　highly　performances　with　a　responsivity　of　417　A/W,　detectivity　of　7.84　×　1012　Jones,　and　external　quantum　efficiency　of　2.01　×　105　%.　©　2024　Elsevier　Ltd

Keyword：

Amorphous Ga2O3 Photodetectors

Community：

[ 1 ] [Peng K.]State Key Laboratory of Photocatalysis on Energy and Environment, College of Chemistry, Fuzhou University, Fuzhou, 350108, China
[ 2 ] [Xue D.]Key Laboratory of Optoelectronic Materials Chemistry and Physics, Fujian Institute of Research on the Structure of Matter, Chinese Academy of Sciences, Fujian, Fuzhou, 350002, China
[ 3 ] [Lin W.]State Key Laboratory of Photocatalysis on Energy and Environment, College of Chemistry, Fuzhou University, Fuzhou, 350108, China
[ 4 ] [Lv P.]Key Laboratory of Optoelectronic Materials Chemistry and Physics, Fujian Institute of Research on the Structure of Matter, Chinese Academy of Sciences, Fujian, Fuzhou, 350002, China

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Amorphous Ga2O3-based solar-blind photodetectors on crystalline and amorphous substrates: A comparative study
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Source ：

Materials Science in Semiconductor Processing

ISSN： 1369-8001

Year： 2024

Volume： 179

4 . 2 0 0

JCR@2023

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