Aiming　at　the　problems　of　large　position　error　and　low　efficiency　of　manual　operation　in　the　surface　mounting　process　of　micro-electronic　components,　there　is　a　three-axis　&　R-axis　surface　mount　system　for　micro-TEC　components　based　on　machine　vision.　The　system　combines　nine-point　calibration　with　vision,　recognizing　targets　and　obtaining　feature　points　by　using　shape-based　template　matching　algorithms.　In　addition,　this　paper　proposes　a　method　for　measuring　the　precision　of　repeated　positioning　based　on　machine　vision.　Then　the　nonlinear　optimization　algorithm　is　used　to　establish　the　error　compensation　model　and　we　embed　it　into　the　motion　control　to　achieve　the　system　with　high　repeatable　positioning　accuracy　and　high　reliability.　The　triaxial　&　R-axis　surface　mount　system　can　complete　the　mounting　task　of　micro-TEC　components,　and　thus　it　is　of　great　significance　to　solve　the　mounting　problem　in　the　field　of　microelectronics.　©　2023　IEEE.