The　magneto-optical　effects　of　rare　earth　ferrite　can　be　greatly　improved　by　doping　Ce3+　ions.　CeFeO3　with　high　Ce3+　concentration　has　excellent　magneto-optical　properties　in　theory.　And　due　to　its　perovskite　structure　it　is　more　suitable　to　be　deposited　on　the　substrates　of　optical　devices　compared　with　the　commercial　garnet　ferrite.　In　this　paper,　the　pure　phase　CexFe2–xO3　films　were　successfully　obtained　on　the　quartz　glass　and　-oriented　SrTiO3　crystal　substrates　by　radio　frequency　magnetron　sputtering.　The　effects　of　substrate　and　Ce:Fe　ratio　on　the　epitaxial　orientation,　magnetism　and　magneto-optical　performance　of　films　were　systematically　studied.　For　the　Ce1.0Fe1.0O3/STO　film,　its　MCD　ellipticity　(ψF)　intensity　can　reach　up　to　4750(°)/cm　in　the　visible　band　and　14090(°)/cm　in　near　ultraviolet　band.　And　it　also　shows　a　strong　vertical　magnetic　anisotropy,　which　makes　it　maintain　a　good　thermal　stability　when　the　device　size　is　reduced.　These　mean　that　the　Ce1.0Fe1.0O3/STO　film　has　a　promising　application　in　integrated　optical　communication　devices.　©　2023　Chinese　Society　of　Rare　Earths