The　imaging　speed　of　atomic　force　microscope　(AFM)　is　limited　by　the　cantilever　mechanical　bandwidth,　which　can　be　increased　by　reducing　the　size　of　the　cantilever.　However,　the　ordinary　laser　reflection　method　cannot　measure　the　deflection　of　a　small　cantilever.　Moreover,　some　samples　are　sensitive　to　light　detection　and　not　suitable　for　the　laser　reflection　method.　Therefore,　the　self-induction　probe　technology　was　developed　to　solve　this　problem.　This　article　reviews　the　latest　AFM　self-induction　probe　technology　and　introduces　three　types　of　self-induction　probes.　Firstly,　it　is　introduced　that　the　current　self-sensing　probes　can　be　divided　into　piezoresistive　type,　piezoelectric　type　and　tuning　fork　type　according　to　the　working　mechanisms　and　preparation　materials.　Then,　the　latest　materials　and　structures　of　various　self-sensing　probe　technologies　are　introduced　to　im-prove　imaging　performance　and　their　applications　in　various　fields.　Moreover,　compared　with　traditional　laser　reflection　methods,　the　self-sensing　probe　technologies　have　a　simpler　structure,　take　up　less　space　and　can　be　integrated　in　a　large　cantilever　array　and　adopted　for　imaging　of　photosensitive　products.　Finally,　some　prospects　of　the　novel　imaging　and　sample　characterization　techniques　and　new　applications　of　atomic　force　microscopy　are　also　discussed.　©　2021　Bentham　Science　Publishers.