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author:

Xiao, Yifeng (Xiao, Yifeng.) [1] | Su, Miaodi (Su, Miaodi.) [2] | Yang, Haoyu (Yang, Haoyu.) [3] | Chen, Jianli (Chen, Jianli.) [4] | Yu, Jun (Yu, Jun.) [5] | Yu, Bei (Yu, Bei.) [6]

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EI

Abstract:

With feature size scaling and complexity increase of circuit designs, hotspot detection has become a significant challenge in the very-large-scale-integration (VLSI) industry. Traditional detection methods, such as pattern matching and machine learning, have been made a remarkable progress. However, the performance of classifiers relies heavily on reference layout libraries, leading to the high cost of lithography simulation. Querying and sampling qualified candidates from raw datasets make active learning-based strategies serve as an effective solution in this field, but existing relevant studies fail to take sufficient sampling criteria into account. In this paper, embedded in pattern sampling and hotspot detection framework, an entropy-based batch mode sampling strategy is proposed in terms of calibrated model uncertainty and data diversity to handle the hotspot detection problem. Redundant patterns can be effectively avoided, and the classifier can converge with high celerity. Experiment results show that our method outperforms previous works in both ICCAD2012 and ICCAD2016 Contest benchmarks, achieving satisfactory detection accuracy and significantly reduced lithography simulation overhead. © 2021 IEEE.

Keyword:

Artificial intelligence Costs Entropy Lithography Pattern matching Uncertainty analysis VLSI circuits

Community:

  • [ 1 ] [Xiao, Yifeng]Fudan University, Department of Microelectronics, Shanghai; 201203, China
  • [ 2 ] [Su, Miaodi]Fuzhou University, College of Mathematics and Computer Science, Fuzhou; 350108, China
  • [ 3 ] [Yang, Haoyu]The Chinese University of Hong Kong, Department of Computer Science and Engineering, NT, Hong Kong
  • [ 4 ] [Chen, Jianli]Fudan University, Department of Microelectronics, Shanghai; 201203, China
  • [ 5 ] [Yu, Jun]Fudan University, State Key Lab of Asic System, Shanghai; 200433, China
  • [ 6 ] [Yu, Bei]Fuzhou University, College of Mathematics and Computer Science, Fuzhou; 350108, China

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ISSN: 0738-100X

Year: 2021

Volume: 2021-December

Page: 907-912

Language: English

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count: 3

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 0

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