For　investigate　the　quasi-state　and　dynamic　characterization　of　an　electrically　actuated　circular　plate,　a　method　for　generating　a　reduced　order　model　(ROM　or　macro-model)　is　presented,　which　is　based　on　mode　analysis.　The　ROM　is　represented　as　an　analytical　function　in　the　term　of　a　set　of　mode　coordinates.　After　a　set　of　finite　element　analysis　running　is　completed,　a　nonlinear　function　fitting　scheme　will　be　used　for　constructing　an　analytical　model　of　kinetic　energy,　strain　energy　and　electrostatic　co-energy.　Then　the　generalized　equations　of　motion　are　used　for　the　electrically　actuated　circular　plate　quasi-state　and　dynamic　behaviors　simulation.　The　calculated　results　show　that　this　macromodeling　method　can　consider　the　effect　of　residual　stress,　and　the　resulting　ROM　can　capture　the　dynamic　behaviors　of　the　circulate　plate　very　well.