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author:

Lin, J. (Lin, J..) [1] | Weng, W. (Weng, W..) [2] | Huang, W. (Huang, W..) [3] | Zhou, H. (Zhou, H..) [4]

Indexed by:

Scopus

Abstract:

Ag thin films were prepared on the float-glass substrate by DC magnetron sputtering method. The relationship of surface morphology/electrical properties with technical conditions was investigated. The experimental results showed that sputtering power, sputtering pressure and substrate temperature had effects on the morphology and electrical properties of Ag thin films. The optimum parameters were obtained with sputtering power of 100 W, sputtering pressure of 0.4 Pa and substrate temperature of 130 °C. Under the optimum parameters, the deposited Ag thin film was smooth and its resistivity was as low as 1.96×10-8 Ω·m. © (2012) Trans Tech Publications, Switzerland.

Keyword:

Ag thin film; DC magnetron sputtering; Resistivity

Community:

  • [ 1 ] [Lin, J.]College of Physics and Information Engineering, Fuzhou University, Fuzhou 350108, China
  • [ 2 ] [Weng, W.]College of Physics and Information Engineering, Fuzhou University, Fuzhou 350108, China
  • [ 3 ] [Huang, W.]College of Physics and Information Engineering, Fuzhou University, Fuzhou 350108, China
  • [ 4 ] [Zhou, H.]College of Physics and Information Engineering, Fuzhou University, Fuzhou 350108, China

Reprint 's Address:

  • [Lin, J.]College of Physics and Information Engineering, Fuzhou University, Fuzhou 350108, China

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Source :

Applied Mechanics and Materials

ISSN: 1660-9336

Year: 2012

Volume: 217-219

Page: 1068-1072

Language: English

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 1

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