Ni-Cr　binary　alloy　targets　were　widely　used　in　sputtering　industry.　The　phase　structure,　phase　transformation　and　microstructure　under　different　heat　treatment　process　of　the　Ni-Cr　binary　alloy　were　studied　quantificationally　by　combining　computational　simulation　with　key　experiments.　The　interaction　between　incident　ions　and　solid　target　material　was　also　simulated.　The　effects　of　sputtering　factors　were　analyzed,　thus　a　set　of　optimization　process　parameters　were　obtained　in　ion　beam　sputtering　process.　By　using　vacuum　induction　levitation　melting　technology,　some　pure　and　homogenous　ingots　were　obtained.　According　to　the　calculated　phase　diagram,　a　series　of　heat　treatments　were　carried　out.　The　metallographic　microscopy,　scanning　electron　microscopy　plus　energy　diffraction　spectrum　experiment,　X-ray　diffraction　analysis,　were　employed　to　analyse　the　microstructure　and　phase　structure.　The　results　showed　that　the　alloy　microstructure　and　composition　distribution　in　micro-zone　of　Ni-Cr　were　sensitive　to　heat　treatment　process,　for　example,　the　atomic　content　of　Ni　in　BCC　phase　changed　from　5%　to　30%　when　the　heat　treatment　temperature　changed　from　1000　to　1200°C.　The　reasonable　heat　treatment　annealing　temperature　of　the　Ni-Cr　alloy　to　obtain　high　quality　target　materials　with　homogeneous　structure　and　composition　was　proposed.　When　the　content　of　Ni　was　at　20%~70%(atom　fraction),　homogenization　heat　treatment　and　quenching　at　a　high　temperature　range　of　1200~1300°C,　and　uniform　annealing　time　depended　on　annealing　temperature　ranges　from　2　to　24　h.　After　simulating　the　interaction　between　the　incident　ion　and　solid　atoms　of　Ni-Cr　system　alloy　target　material　in　the　process　of　ion　beam　sputtering　based　on　the　random　cascade　collision　theory　and　Monte　Carlo　theory,　the　composition　of　sputtering　product　and　target　material　are　not　considerable　deviation,　because　the　Ni　and　Cr　atomic　surface　energy　are　closed　to　each　other.　This　characteristic　is　very　positive　in　selection　of　target　composition　and　thus　the　control　of　the　film　composition.