Electrostatic　micro-devices　are　simple　but　important　for　MEMS　applications.　Precise　dynamic　descriptions　of　these　devices　are　often　hard　to　obtain　due　to　the　electrostatic　nonlinearity　and　the　fluid-structure　interactions　in　devices.　Here　we　present　a　comprehensive　electrostaticmechanical-　fluidic　coupling　transient　analysis　for　the　pull-in　process　of　two　ends　fixed　micro-plate　device.　The　numerical　results　are　compared　with　the　published　experiment　works　of　other　researchers　available　in　the　literature,　and　thus　the　model　had　been　validated.　After　that　the　proper　orthogonal　decomposition　approach　is　performed　for　the　snapshot　matrixes　which　are　sampled　from　an　ensemble　of　the　fully　finite　element　results.　The　resulted　spatial　distribution　modes　of　pressure　show　a　higher　spatial　frequency　toward　the　middle　of　the　micro-plate,　which　indicates　that　the　pressures　at　the　moving　edges　of　the　plate　are　not　equal　to　ambient　pressure.　Due　to　the　increasing　demands　for　simulation　accuracy,　the　electrostatic-　mechanical　interactions　and　the　nonlinear　features　of　viscous　loss　from　the　surrounding　fluid　have　to　be　taken　into　account　in　details.　©　2013　Trans　Tech　Publications　Ltd,　Switzerland.