The　local　Petrov　Galerkin　(MLPG)　method　is　a　truly　mesh　free　methods　in　all　the　existent　methods.　In　the　modeling　and　simulation　of　the　micro　electro　mechanical　system　(MEMS)　devices,　the　large　deformation　or　the　geometrical　nonlinearity　must　be　considered.　The　meshless　method　shows　its　potential　in　this　area　because　no　mesh　is　needed.　A　local　meshless　formulation　is　further　developed　for　large　deformation　analysis　in　the　MEMS　device.　Two　typical　microswitches,　cantilever　and　fixed　fixed　microswitches,　are　simulated　by　the　developed　nonlinear　MLPG　method　under　nonlinear　load.　Comparing　with　the　results　obtained　by　the　linear　analysis　and　FEM,　it　has　demonstrated　that　the　MLPG　method　is　effective　for　large　deformation　analysis.