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Abstract:
The surface-conduction field-emission cathode arrays were fabricated by photolithography with the magnetron sputtered SnO2 thin films on glass substrate. The impacts of the fabrication conditions, particularly the SnO2 film thicknessand cathode-gate gap, on microstructures and field emission characteristics were evaluated. The SnO2films and arrayswere characterized with X-ray diffraction and photoelectron spectroscopy, and atomic force microscopy. The results show that SnO2 was deposited at the cathode-gate gap, and that an increase of film thickness enlarged SnO2grain size and increased the surface roughness. For all film thickness, the emission and conduction currents were found to be completely controlled by the gate voltage. With a thickness of 60 nm, a gapof 500 μm, at an anode voltage of 3200 V and a gate voltage of 200 V, the emission efficiency was found to be around 0.71%, the highest brightness reached 650 cd/m2. We suggest that SnO2 film may be a good material in fabrication of surface-conduction field-emission cathode arrays.
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Journal of Vacuum Science and Technology
ISSN: 1672-7126
Year: 2014
Issue: 8
Volume: 34
Page: 814-818
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ESI Highly Cited Papers on the List: 0 Unfold All
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30 Days PV: 3
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