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Analytical model of electrostatic fixed-fixed microbeam for pull-in voltage

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author:

Lin, X. (Lin, X..) [1] | Ying, J. (Ying, J..) [2]

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Scopus

Abstract:

The pull-in problem of fixed-fixed beam structures cannot be solved analytically due to its nonlinear from the large deflection and the electrostatic driving force. So to understanding the characters of the devices, the designers have to resort to numerical techniques. Lack of an accurate model for predicting pull-in voltage for basic micromachined beam structures necessitates the clear need for a closed form expression for the pull-in voltage. A new analytical model has been developed based on Rayleigh-Ritz method for determining the pull-in voltage of an electrostatically actuated micro-beam. Three new parameters with the dimension of voltage square have been introduced for considering the contribution from stretch stress gradient nonlinear stiffening, bending, and the residual stress. Thus, the model can takes into account the effects of axial stress, residual stress, stretch stress gradient non-linear stiffening, and fringing fields on the pull-in voltage. Modeling result has been compared with published work of other researchers available in the literature and FEM simulation results, it is found the presented model estimation results agree well with FEM simulated results in most common case. © 2008 IEEE.

Keyword:

Assumed modal method; Electrostatically actuated; Energy method; Pull-in voltages

Community:

  • [ 1 ] [Lin, X.]College of Mechanical and Energy Engineering, ZheJiang University, Hangzhou 310027, China
  • [ 2 ] [Lin, X.]College of Mechanical Engineering and Automation, FuZhou University, FuZhou 350002, China
  • [ 3 ] [Ying, J.]College of Mechanical and Energy Engineering, ZheJiang University, Hangzhou 310027, China

Reprint 's Address:

  • [Lin, X.]College of Mechanical and Energy Engineering, ZheJiang University, Hangzhou 310027, China

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Source :

ASME International Conference on Advanced Intelligent Mechatronics, AIM

Year: 2008

Page: 803-807

Language: English

Cited Count:

WoS CC Cited Count:

30 Days PV: 0

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