High-shear-velocity composite acoustic materials of AlN/diamond for biological MEMS devices - Details

author：

Huang, H.-S. (Huang, H.-S..) ^[1] | Wu, S. (Wu, S..) ^[2]

Indexed by：

Scopus

Abstract：

Shear　horizontal　(SH)　surface　acoustic　wave　(SAW)　sensors　formed　by　combining　(100)　AlN　films　with　a　diamond　substrate　have　been　developed　in　this　research.　The　propagation　characteristics　of　SAW　in　four　composite　structures　according　to　the　positions　of　interdigital　transducer　(IDT)　electrodes　and/or　thin　metal　films　were　investigated　theoretically.　Those　composite　SAW　substrates　exhibited　excellent　SH　SAW　properties　and　have　the　potential　for　further　application　in　biological　and　liquid　SAW　sensors.　©　MYU　K.K.

Keyword：

(100) AlN; Diamond; Sensors; SH SAW

Community：

[ 1 ] [Huang, H.-S.]College of Robotics, Fuzhou Polytechnic, Fuzhou University Town, No. 8 Lianrong Road, Fujian Province, 350108, China
[ 2 ] [Wu, S.]Department of Digital Game and Animation Design, Tung Fang Design University, No. 110, Dongfang Rd., Hunei Dist., Kaohsiung City, 82941, Taiwan

Reprint 's Address：

[Wu, S.]Department of Digital Game and Animation Design, Tung Fang Design University, No. 110, Dongfang Rd., Hunei Dist., Taiwan

Email：

wusean.tw@gmail.com

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Source ：

Sensors and Materials

ISSN： 0914-4935

Year： 2019

Issue： 2

Volume： 31

Page： 429-435

0 . 5 9 9

JCR@2019

1 . 0 0 0

JCR@2023

ESI HC Threshold：236

JCR Journal Grade：4

CAS Journal Grade：4

Cited Count：

WoS CC Cited Count：

SCOPUS Cited Count：

ESI Highly Cited Papers on the List： 0 Unfold All

WanFang Cited Count：

Chinese Cited Count：

30 Days PV： 0

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