Berkovich　nanoindentation　experiments　on　a　fused　silica　sample　with　different　tilt　angles　were　carried　out.　The　indentation　results　show　that　the　tilt　of　the　sample　affects　the　shape　of　the　loading　curves.　The　maximum　indentation　depth,　residual　depth　and　contact　depth　gradually　decrease　with　the　increase　of　the　tilt　angle　of　the　specimen　at　the　same　indentation　load,　but　the　unloading　curves　are　not　affected,　and　they　remain　parallel　to　each　other,　the　fitting　parameter　m　of　the　unloading　curves　and　the　value　of　contact　stiffness　remain　constant　regardless　of　the　inclination　of　the　sample.　In　addition,　it　is　found　that　the　sample　tilt　will　lead　to　smaller　indentation　projected　contact　area,　which　will　make　the　hardness　and　elastic　modulus　larger.　©　2019,　Acta　Metrologica　Sinica　Press.　All　right　reserved.