The　volume　miniaturization　and　functional　diversification　of　electronic　products　have　brought　great　challenges　to　its　voltage　regulator　modules　that　power　various　internal　chips.　Power　supply　on　chip　(PwrSoC)　system　has　a　broad　application　prospect　in　this　aspect,　and　the　key　to　promote　its　further　development　and　promotion　application　is　the　breakthrough　of　thin-film　magnetic　micro-inductor　technology　for　processing　high-frequency　power.　The　research　status　at　home　and　abroad　of　thin　film　micro-inductor　technology　is　mainly　introduced　and　analyzed,　including　magnetic　thin　film　materials,　processing　technology　and　inductor　structure.　Furthermore,　it　is　pointed　out　that　reasonable　selection　and　proper　optimization　of　different　technical　solutions　included　in　the　above　three　basic　elements　according　to　actual　working　conditions　is　the　key　to　the　design　and　fabrication　of　thin　film　magnetic　micro-inductor　with　excellent　performance.　Finally,　the　development　trends　of　thin　film　magnetic　micro-inductor　technology　are　prospected.　©　2019,　Electrical　Technology　Press　Co.　Ltd.　All　right　reserved.