In　order　to　study　the　thermo-optic　effect　of　the　optical　microsphere　cavity,　two　kinds　of　pump　sources,　1　550　nm　band　tunable　laser　and　broadband　light　source,　were　used　to　measure　the　change　of　the　resonance　peak　wavelength　of　silica,　tellurite　glass　microsphere　and　rare　earth　ion　doped　microsphere　when　the　excitation　light　power　and　environment　temperature　change.　The　excitation　power　sensitivity　of　the　silica　microspheres　was　32.4　pm/mW　and　the　temperature　sensitivity　was　13.4　pm/℃.　For　the　thulium　ions　doped　silica　microsphere,　the　sensitivity　of　excitation　power　was　48.7　pm/mw　and　the　sensitivity　of　the　environment　temperature　was　15.2　pm/℃.　The　excitation　power　sensitivity　of　the　tellurite　microsphere　was　71.1　pm/mw,　and　the　temperature　sensitivity　was　0.019　1　nm/℃,　which　was　nearly　one　times　higher　than　that　of　the　FBG　temperature　sensor　(10　pm/℃).　If　the　rare　earth　ions　were　doped,　the　sensitivity　was　1.1　times　higher.　The　results　have　reference　significance　for　the　microcavity　applications　of　the　temperature　sensor.　©　2020,　Science　Press.　All　right　reserved.