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author:

Fan, X. (Fan, X..) [1] | Sun, J. (Sun, J..) [2] | Guo, W. (Guo, W..) [3] | Ke, X. (Ke, X..) [4] | Yan, C. (Yan, C..) [5] | Li, X. (Li, X..) [6] | Dong, Y. (Dong, Y..) [7] | Xiong, F. (Xiong, F..) [8] | Fu, Y. (Fu, Y..) [9] | Wang, L. (Wang, L..) [10] | Deng, J. (Deng, J..) [11] | Xu, C. (Xu, C..) [12]

Indexed by:

Scopus

Abstract:

Large area graphene is usually grown by chemical vapor deposition on Cu or Ni catalysts at ∼1000 °C. For most materials, high temperature leads to high quality. However, graphene growth at even higher temperatures is rarely reported. Therefore, here we systematically investigate the graphene deposition on refractory metals i.e. metals with extremely high melting points. The growth parameters and material characterizations are given in detail. On Ta which readily forms carbides during the carbon deposition, the growth mode is monolayer due to the chemical absorption of excess carbon in the bulk metal. On Re, there is no carbide formed (except in extreme conditions), which greatly simplifies the scenario. Because of the relatively high carbon solubility in Re, the growth temperature has to be limited in order not to drift into the dominantly multilayer graphene regime caused by the carbon segregation. Graphene with reasonable quality has been achieved, although not as good as expected. For example, on Ta, the residual bonds between the graphene and substrate deteriorate the graphene crystalline quality. Despite the difficulties in refractory metal etching, the transfer technique of the graphene is also explored. This research contributes to the fundamental understanding of the graphene growth theory and technology on refractory metals. © 2018 Elsevier B.V.

Keyword:

Chemical vapor deposition; Graphene; High temperature growth; Refractory metal

Community:

  • [ 1 ] [Fan, X.]Key Laboratory of Optoelectronics Technology, College of Microelectronics, Beijing University of Technology, Beijing, 100124, China
  • [ 2 ] [Sun, J.]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fuzhou University, Fuzhou, 350116, China
  • [ 3 ] [Guo, W.]Key Laboratory of Optoelectronics Technology, College of Microelectronics, Beijing University of Technology, Beijing, 100124, China
  • [ 4 ] [Ke, X.]Institute of Microstructures and Properties of Advanced Materials, Beijing University of Technology, Beijing, 100124, China
  • [ 5 ] [Yan, C.]Department of Information and Automation, Library of Fuzhou University, Fuzhou, 350116, China
  • [ 6 ] [Li, X.]Key Laboratory of Optoelectronics Technology, College of Microelectronics, Beijing University of Technology, Beijing, 100124, China
  • [ 7 ] [Dong, Y.]Key Laboratory of Optoelectronics Technology, College of Microelectronics, Beijing University of Technology, Beijing, 100124, China
  • [ 8 ] [Xiong, F.]Key Laboratory of Optoelectronics Technology, College of Microelectronics, Beijing University of Technology, Beijing, 100124, China
  • [ 9 ] [Fu, Y.]Key Laboratory of Optoelectronics Technology, College of Microelectronics, Beijing University of Technology, Beijing, 100124, China
  • [ 10 ] [Wang, L.]Key Laboratory of Optoelectronics Technology, College of Microelectronics, Beijing University of Technology, Beijing, 100124, China
  • [ 11 ] [Deng, J.]Key Laboratory of Optoelectronics Technology, College of Microelectronics, Beijing University of Technology, Beijing, 100124, China
  • [ 12 ] [Xu, C.]Key Laboratory of Optoelectronics Technology, College of Microelectronics, Beijing University of Technology, Beijing, 100124, China

Reprint 's Address:

  • [Sun, J.]National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fuzhou UniversityChina

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Source :

Synthetic Metals

ISSN: 0379-6779

Year: 2019

Volume: 247

Page: 233-239

3 . 2 8 6

JCR@2019

4 . 0 0 0

JCR@2023

ESI HC Threshold:138

JCR Journal Grade:1

CAS Journal Grade:3

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count: 7

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 1

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