Blind AFM tip estimation by using porous anodic alumina membrane - Details

author：

Han, Guoqiang (Han, Guoqiang.) ^[1] (Scholars：韩国强) | Chen, Shu (Chen, Shu.) ^[2] | Zhang, Dong (Zhang, Dong.) ^[3] (Scholars：张栋)

Indexed by：

EI Scopus

Abstract：

AFM　images　are　distorted　representations　of　sample　surfaces　due　to　the　dilation　produced　by　the　AFM　tip　shape　in　micro/nano-scale　profile　measurement.　It　is　necessary　to　obtain　the　tip　shape　information　in　order　to　correct　such　distortion　in　micro/nano　metrology.　Ordered　nano　porous　alumina　templates　have　attracted　increasing　attention　in　recent　years　due　to　their　possible　utilization　as　templates　for　the　organization　of　nanosize　structures　or　others.　Porous　anodic　alumina　membrane　is　used　as　an　AFM　tip　characterizer　to　estimate　the　AFM　tip　shape　and　scanning　direction-based　characterization　method　is　used　to　estimate　the　AFM　tip　shape.　©　2011　IEEE.

Keyword：

Alumina Aluminum oxide Aluminum sheet Atomic force microscopy Blind equalization Nanoprobes

Community：

[ 1 ] [Han, Guoqiang]School of Mechanical Engineering and Automation, Fuzhou University, Fuzhou, Fujian, 350108, China
[ 2 ] [Han, Guoqiang]School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi, 710049, China
[ 3 ] [Chen, Shu]School of Mathematics and Computer Science, Fuzhou University, Fuzhou, Fujian, 350108, China
[ 4 ] [Zhang, Dong]School of Mathematics and Computer Science, Fuzhou University, Fuzhou, Fujian, 350108, China