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Abstract:
In high-power RF ion source, three different regions of the Hβ and Hγ intensities in the Balmer series of spectral lines for atomic hydrogen plasma were investigated. Three different regions of the Hβ and Hγ intensities were detected by the increase of input power (0-6 kW) at ICP. In hydrogen plasma spectrum, the Hβ and Hγ intensities showed three processes: slowly increase, quickly increase and stable saturation. The Stark effect in strong electrical field plays a crucial role in dominating the Balmer Hβ and Hγ emissions from high-density RF plasma. © (2013) Trans Tech Publications, Switzerland.
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ISSN: 1022-6680
Year: 2013
Volume: 774-776
Page: 471-478
Language: English
Cited Count:
SCOPUS Cited Count: 1
ESI Highly Cited Papers on the List: 0 Unfold All
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Chinese Cited Count:
30 Days PV: 0
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