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Abstract:
The SnO2/WO3 double layer thin film was prepared by magnetron sputtering in which a tin (Sn) target and a tungsten (W) target were operated in radio frequency (RF) reactive mode. The crystallographic structure of the composite was investigated by X-ray diffraction(XRD) and X-ray photoelectron spectroscopy (XPS). Results reveals that the SnWO4 is formed by SnO2 and WO3. The sensor using the SnO2/WO3 double layer thin film was prepared, the preparation technology parameter, operated condition and the gas-sensing properties of the SnO2/WO3 double layer thin film sensor, such as sensitivity, selectivity, response and recovery, were researched. The results indicate that the sensor has the good sensitivity to NO2 gas, and is insensitive to other disturbance gases.
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Material Science and Technology
ISSN: 1005-0299
CN: 23-1345/TB
Year: 2010
Issue: 5
Volume: 18
Page: 719-723,728
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SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 3
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