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author:

Lin, Wei (Lin, Wei.) [1] | Huang, Shi-Zhen (Huang, Shi-Zhen.) [2] | Chen, Wen-Zhe (Chen, Wen-Zhe.) [3]

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Abstract:

The SnO2/WO3 double layer thin film was prepared by magnetron sputtering in which a tin (Sn) target and a tungsten (W) target were operated in radio frequency (RF) reactive mode. The crystallographic structure of the composite was investigated by X-ray diffraction(XRD) and X-ray photoelectron spectroscopy (XPS). Results reveals that the SnWO4 is formed by SnO2 and WO3. The sensor using the SnO2/WO3 double layer thin film was prepared, the preparation technology parameter, operated condition and the gas-sensing properties of the SnO2/WO3 double layer thin film sensor, such as sensitivity, selectivity, response and recovery, were researched. The results indicate that the sensor has the good sensitivity to NO2 gas, and is insensitive to other disturbance gases.

Keyword:

Film preparation Magnetron sputtering Nitrogen oxides Thin films Tungsten compounds X ray photoelectron spectroscopy

Community:

  • [ 1 ] [Lin, Wei]College of Material Science And Engineering of Fuzhou University, Fuzhou 350002, China
  • [ 2 ] [Lin, Wei]College of Physics and Information Engineering of Fuzhou University, Fuzhou 350002, China
  • [ 3 ] [Lin, Wei]Fujian Key Laboratory of Microelectronics and Integrated Circuits, Fuzhou 350002, China
  • [ 4 ] [Huang, Shi-Zhen]College of Material Science And Engineering of Fuzhou University, Fuzhou 350002, China
  • [ 5 ] [Huang, Shi-Zhen]College of Physics and Information Engineering of Fuzhou University, Fuzhou 350002, China
  • [ 6 ] [Huang, Shi-Zhen]Fujian Key Laboratory of Microelectronics and Integrated Circuits, Fuzhou 350002, China
  • [ 7 ] [Chen, Wen-Zhe]College of Material Science And Engineering of Fuzhou University, Fuzhou 350002, China

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Source :

Material Science and Technology

ISSN: 1005-0299

CN: 23-1345/TB

Year: 2010

Issue: 5

Volume: 18

Page: 719-723,728

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 3

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