Metal　oxidation　at　high　temperature　is　often　accompanied　with　the　stress　generation　both　in　the　metal　substrate　and　the　growing　oxide　scale.　In　this　paper,　taking　into　account　the　growth　strain,　intrinsic　strain　and　creep　deformation,　a　new　analysis　model　to　characterize　the　residual　stress　evolutions　during　an　isothermal　oxidation　process　is　developed　on　the　basis　of　the　mechanical-balance　and　moment-equilibrium　equations.　In　this　model,　the　growth　strain　and　the　stress　are　coupled　based　on　an　evolving　equation,　which　reduces　to　the　Clarke’s　assumption　if　the　stress　influence　on　the　growth　strain　of　the　oxide　scale　is　ignored.　The　curvature　describing　the　bending　of　the　system　is　expressed.　Euler　numerical　method　is　adopted　to　simulate　the　stress　evolution　and　the　comparisons　among　the　present　model,　Zhang’s　creep　solution　and　the　experimental　results　are　also　performed.　Finally,　effects　of　creep　constants,　substrate　thickness　and　intrinsic　strain　on　the　residual　stress　distribution　in　the　oxide　scale/metal　substrate　are　discussed.　©　2015,　Springer　Science+Business　Media　New　York.