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Abstract:
Electrostatic pull-in is a famous instable behavior of an electrostatic actuation. For most microbeam structure the beam's highness and the deflection are in same magnitude and thus should be treated as a large deflection problem. A new analytical model has been developed-based on energy method for determining the pull-in voltage of electrostatically actuated fixed-fixed microbeams. Effects of axial stress, residual stress and stretch stress gradient non-linear stiffening, and fringing fields are all considered. The results have been compared with published work of other researchers and are found to agree well with the FEM results in most common case.
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3RD CHINA-JAPAN CONFERENCE ON MECHATRONICS 2006 FUZHOU
Year: 2006
Page: 186-189
Language: English
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ESI Highly Cited Papers on the List: 0 Unfold All
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30 Days PV: 0
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