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In the research of the self-aligned dicing technology, due to tens of thousands of types of wafer image samples, there are diverse types of street in wafer image. In order to properly identify the paddle vat in the street and get center line of the paddle vat for cutting by using binary segmentation, it's a crucial step for binarization of wafer images. To take into account the diversity of the wafer images, it is quite difficult to find a good threshold. In this paper, we propose a binarization approach based on the density histogram to locate the center line of paddle vat of the wafer image. The histogram of a wafer image is smoothed by using a quadratic exponential function and then an appropriate threshold is calculated. The experiments show that the new method is very effective for the wafer image processing.
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PROCEEDINGS OF THE NINTH INTERNATIONAL SYMPOSIUM ON DISTRIBUTED COMPUTING AND APPLICATIONS TO BUSINESS, ENGINEERING AND SCIENCE (DCABES 2010)
Year: 2010
Page: 561-564
Language: English
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ESI Highly Cited Papers on the List: 0 Unfold All
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30 Days PV: 0
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